Used HITACHI / KOKUSAI DJ-1206VN-DM #9358282 for sale

HITACHI / KOKUSAI DJ-1206VN-DM
ID: 9358282
Vertical LPCVD furnace Process: Nitride.
HITACHI / KOKUSAI DJ-1206VN-DM is a diffusion furnace and accessory designed for process development and manufacture of optoelectronic components, semiconductor devices, and materials with submicron feature sizes. This highly-efficient, fast-heating equipment helps eliminate thermal gradients, resistivity of silicon and other parameters. HITACHI DJ-1206VN-DM is a vertical-type diffusion furnace, which offers a high-temperature high-pressure (450 Torr) atmosphere using high-gallium (GaCl) gas. It offers maximum stability temperatures up to 1300°C, and has a baking cycle time of 30 minutes. It also offers precise temperature control for a wide range of processes such as deposition, diffusion, and drive-in. KOKUSAI DJ-1206VN-DM is designed for high-production yield and low-cost operation. Its advanced exothermal insulation and cold crucible construction are designed to reduce gas consumption and ensure temperature uniformity within the heating zone. The result is optimal efficiency and low cost-per-unit production. The on-board touchscreen panel is user-friendly and designed for maximum operator ease-of-use. It offers features such as process memory, recipe management, temperature recording, and quick-to-configure action menus. The system also offers a choice of either remote or local monitoring of process parameters. DJ-1206VN-DM's modular design allows for a wide range of fixtures and accessories, as well as data logging and computer control interfaces. Its chamber components are constructed of stainless steel and are designed for maximum product yield. A range of optional pumps and gas lines are available to accommodate various processes and production needs. The unit includes a nitrogen injection vent machine for cooling of process gases, as well as an automatic gas purge cycle, and a low-maintenance filter. These features ensure maximum safety levels and operational versatility. The high-performing HITACHI / KOKUSAI DJ-1206VN-DM diffusion furnace is designed to deliver optimal product yield, low operational cost, and maximum safety. Its advanced features such as exceptional temperature control, uniformity of heating zone, and robust insulation are designed to assure optimal process performance. It is a cost-effective solution for physical vapor deposition, high-temperature diffusion and other processing needs.
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