Used HITACHI / KOKUSAI DJ-1223 #293636498 for sale

HITACHI / KOKUSAI DJ-1223
ID: 293636498
Diffusion furnace.
HITACHI / KOKUSAI DJ-1223 is a diffusion furnace developed to provide exceptional reliability and performance. This top of the line furnace features a stainless steel chamber with quartz components and a heavy duty electrical equipment. The furnace is equipped with a single diffusion zone, capable of temperatures up to 1250C, and a pyrometer for accurate temperature control. The process gases - argon, nitrogen, and hydrogen - are sourced from a recirculating gas system, effectively reducing gas consumption. The furnace interior is cleaned through a reverse gas flow unit that uses oxygen as the cleaning gas. The diffusion zone on HITACHI DJ-1223 is designed to produce a uniform temperature for connections along the wafers. The zone is divided into four thermal regions and uses an internal heater mechanism that is operated by a graphite element. The graphite element is activated via an alternating current generator, which helps to reduce contamination and eliminates arcs due to a weightless power source. KOKUSAI DJ-1223 also features high-speed linear robots and three load ports for loading/unloading wafers. The robots are capable of high throughput rates, which can reduce cycle times significantly. The gas flow machine is completely isolated from the process environment, maintaining the quality of the chamber cleanliness. The furnace cabinet is composed of stainless steel, which provides high corrosion resistance and strength. A radiation shield is included inside the chamber to minimize heat loss. Additionally, DJ-1223 features a flat-end quartz tube, which allows for uniform heat distribution throughout the chamber. In order to maintain quality performance, HITACHI / KOKUSAI DJ-1223 requires frequent maintenance and calibration. This includes regular replacement of all gas and process components, as well as cleaning and adjusting the diffusion chamber and pyrometer. Additionally, all operators should be trained in proper safety procedures, as many of the furnace components are made of glass and other fragile materials. Given premium quality components and reliable process performance, HITACHI DJ-1223 is an ideal choice for many advanced solar cell, thin-film, and IC applications. It is also ideal for a range of other diffusion furnace applications, making it a valuable addition to any lab or fabrication facility.
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