Used HITACHI / KOKUSAI DJ-1223VN #9377454 for sale

HITACHI / KOKUSAI DJ-1223VN
ID: 9377454
Wafer Size: 12"
Diffusion furnace, 12" Type: SiN.
HITACHI / KOKUSAI DJ-1223VN is a diffusion furnace and accessory kit designed for rapid thermal diffusion and rapid thermal processing of optical thin films. The equipment has been designed to provide highly precise and efficient diffusion and rapid thermal processes while supporting various materials and structures. HITACHI DJ-1223VN diffusion furnace features a three-zone design, consisting of a staging zone, diffusion zone, and cooling zone, that allows for independent temperature control. The furnace can heat up to a maximum of 1500 °C and is equipped with an infrared-emitting heater for optimal performance and precision. The sloping quartz tube allows for efficient and uniform heat distribution throughout the chamber and its thermal properties ensure uniform temperatures and repeatability of each diffusion batch. The furnace is also equipped with a pyrometer design that allows for precise temperature measurement, with accuracy of ±1°C. It is further equipped with a digital- programming system that allows the user to program a range of diffusion and rapid thermal processes, including annealing, oxidation, and nitridation. Additionally, the furnace also features an automated door design with no manual operation, allowing for convenient and safe operations and maintenance. KOKUSAI DJ1223VN diffusion furnace and accessory kit is also supplied with various in-situ metrology tools, such as optical monitors and a CoolFlood plasma source. The optical monitors measure a variety of parameters including reflectance, transmittance and Film Thickness Measurement (FTM). The CoolFlood plasma source assists in controlling the film while the rapid thermal processing and diffusion is ongoing. Finally, HITACHI / KOKUSAI DJ1223VN diffusion furnace and accessory kit also includes an integrated dry vacuum unit along with robust thermal insulation to support repeatable and reliable thermal processes. Additionally, the machine is certified for CE regulatory standards, ensuring superior quality and safety in its operations. In short, HITACHI DJ1223VN diffusion furnace and accessory kit is an ideal tool for rapid thermal diffusion and rapid thermal processes for optical thin film applications, delivering high-precision results with customizable settings and reliable performance.
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