Used HITACHI / KOKUSAI DJ-1223VN #9377455 for sale
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ID: 9377455
Wafer Size: 12"
Vintage: 2006
Diffusion furnace, 12"
Type: SiN
2006 vintage.
HITACHI / KOKUSAI DJ-1223VN is a diffusion furnace and its associated accessories, designed for the post-processing of semiconductor wafers. The atmosphere and temperature inside the diffusion furnace are tightly controlled to ensure accurate and repeatable results. The temperature can be set up to 1200°C and the atmosphere can be set to mesh or metal organic decomposed gas. The furnace can also be used for doping, oxidation, and annealing processes. The design of HITACHI DJ-1223VN features a multi-zone grid structure and a unique gas circulation system to provide ideal and even temperature distributuion inside the furnace. The internal furnace walls are also coated with polyimide resin to improve thermal emission. This helps to reduce temperature variations near the center of the wafer and prevents contamination from the reaction chamber. The furnace also has double doors to close it from the outside environment. This provides a far, superior tightness and insulation compared with typical single door designs. The exhaust system is also equipped with a mechanical booster to ensure exhaust gas is forced out firmly. KOKUSAI DJ1223VN is powered by a 220V/1Ø 3KW power source and features a five-step timer with adjustable dwell and ramp rate. The temperature can be set precisely to within 0.1°C via an external controller. Safety components such as overload protection, gas leakage detection, and airlock protection functions are also incorporated. The furnace is supplied with a sample heater, gas control hardware, panel exhaust with a filter, a gas diffusion controller, a power supplies, a resistive heater and other accessories. HITACHI DJ1223VN provides an excellent performance for diffusion furnaces used in semiconductor post-processing. The tight control of the atmosphere and high temperature makes it ideal for applications such as doping, oxidation, and annealing. The multi-zone grid structure, polyimide resin-coated walls, and the double-door design are all features that add to its reliability and safety. Furthermore, the adjustable timer and 0.1°C temperature precision ensures that results are always accurate and repeatable.
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