Used HITACHI / KOKUSAI DJ-1226V-DF Quixace #293667381 for sale

ID: 293667381
Vintage: 2007
Furnace 2007 vintage.
HITACHI BJ-1206V-DF is a diffusion furnace and associated accessories from KOKUSAI Electric Incorporated. It is designed for research and development (R&D) applications where diffused layers are required. The BJ-1206V-DF is a single wafer furnace with vertical heating, consisting of a process chamber with dual quartz tubes, a graphite susceptor and heater. It is designed for wet or dry oxidation, diffusion doping, annealing and other processes for R&D applications. The BJ-1206V-DF utilizes high-temperature heating elements to achieve temperatures up to 1250°C with excellent temperature uniformity. It is equipped with a CVD gas delivery system and a six-inch process chamber. The uniformity of the heating temperature within +/- 3°C is easily attained. The furnace is also equipped with an over-temperature protection system and a gas blow-out system that prevent over-heating while ensuring efficient operation. The BJ-1206V-DF features precise control of gas flow and composition for improved uniformity of diffused layers. It includes a user-friendly touch panel PC for easy operation with a digital display and a programmable timers for quantitative process control. It also offers both manual and automatic operation of the heater, process gases, susceptor and cooling fan. The BJ-1206V-DF is designed to be compatible with a number of process gases such as N2O, Ar, or O2 for various processes. It also includes bubble-type dryers for stable operation and a quartz crystal microbalance (QCM) sensor for monitoring process temperature and pressure. In addition, the furnace is equipped with a data logger to monitor process gas flow as well as temperature and pressure. Overall, HITACHI / KOKUSAI BJ-1206V-DF is a reliable, high-precision diffusion furnace and associated accessories for research and development applications. By operating at temperatures up to 1250°C, with excellent temperature uniformity, the BJ-1206V-DF provides robust performance for the processing of diffused layers. The machine's user-friendly PC interface and programmable data logger enable precise operation and quantitative data acquisition.
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