Used HITACHI / KOKUSAI DJ-802V-H #293811585 for sale
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ID: 293811585
Wafer Size: 6"
Vertical Low Pressure Chemical Vapor Deposition (LPCVD) furnaces, 6".
HITACHI / KOKUSAI DJ-802V-H is a diffusion furnace and accessories designed to be used for production of precise, quality microelectronics and displays. It provides exceptional reliability and process control with rapid thermal control and a multi-zone, quartz tube construction. It is equipped with advanced interlock system safety features that prevent any unauthorised access to the facility. The diffuser is designed to be re-configurable for fast and simple production changes. HITACHI DJ-802V-H is equipped with two active gas zones controlled by two PID controllers for optimum process temperature control. It can also be fitted with a lower limit controller to ensure properly regulated process temperatures. The diffusion process can be easily monitored and accurately adjusted with an integral, ultra-stable pressure sensor. The main channel also features a side-arm port for the connection of up to four additional gas lines. KOKUSAI DJ-802V-H is capable of high-temperature annealing with enhanced oxygen and nitrogen diffusion, while the gas zones are suitable for deposition, oxidation, reduction and etching. The efficient forced hot-air cooling system prevents thermal interference and guarantees stable process temperature. The ample gas corridor permits the external connection of up to four additional gas lines. DJ-802V-H offers several advanced features such as advanced fault diagnostic functions and an improved software control system. In addition, its intuitive Graphical User Interface provides precise monitoring, setting and control of parameters. It is CE and UL certified for optimal safety. The diffusion furnace also features a high-efficiency, UL conformal-coated power supply unit and a 30 litre stainless steel quench chamber for protection. Built for superior performance, HITACHI / KOKUSAI DJ-802V-H is a reliable and efficient diffusion furnace and accessories for the production of quality microelectronics and displays. It offers precise process control, multi-zone construction, advanced safety features, high-temperature annealing capabilities and a user-friendly interface. With its state-of-the-art components and features, HITACHI DJ-802V-H is an ideal choice for the precision production of high-quality microelectronics.
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