Used HITACHI / KOKUSAI DJ-823V #9157635 for sale
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ID: 9157635
Wafer Size: 8"
Vintage: 1996
CVD System, 8"
HTO, N2, SiH4, N2O, 450-850C deg
1996 vintage.
HITACHI / KOKUSAI DJ-823V is a diffusion furnace designed for producing complex wafers and electronic components used in semiconductor devices. HITACHI DJ-823V features an advanced design, providing users with superior processing quality and control. It is capable of reaching temperatures up to 1300°C and incorporates advanced control capabilities such as a high-precision computer-controlled thermal process. Additionally, it features high temperature capability and standard processing capabilities including wafer bond, reflow, and wafer spice. KOKUSAI DJ-823V comes equipped with an electronically-operated hot shield that helps to protect both the material in the furnace and the environment around the furnace. Furthermore, DJ-823V is equipped with an advanced thermal monitoring equipment that ensures stable operations even during energy fluctuations. This monitoring system monitors internal temperature, pressure values, and electric current of the unit and cancut off power in emergency situations. HITACHI / KOKUSAI DJ-823V also has a low contamination design. All internal structures are tempered or plated with a low deposition coating. Additionally, the furnace chamber is constructed with special sealing material to prevent outgassing and dust mixing. This ensures that the atmosphere in the furnace remains clean and free of contaminants. HITACHI DJ-823V comes with a variety of accessories, including a quartz crucible for the diffusion process, ceramic modules, high-temperature insulation baches, and a mechanical arm for wafer processes. It is also compatible with a variety of process systems, including an inert gas build-up unit and a cooling machine for treating the material after processing. KOKUSAI DJ-823V's control panel has an intuitive interface, allowing users to quickly and easily establish and manage process parameters. Additionally, the panel enables users to remotely access the integrated controller and observe data obtained from the thermal chamber. This allows users to monitor the process in real time and manage it from any location. DJ-823V diffusion furnace is a powerful and reliable tool for any semiconductor process. Equipped with the latest monitoring and control features, speedy processing, and a low contamination design, HITACHI / KOKUSAI DJ-823V is a necessary tool for producing high-quality components that meet the highest standards.
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