Used HITACHI / KOKUSAI DJ-825V #9294270 for sale
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ID: 9294270
Wafer Size: 8"
Furnace, 8"
With load lock
Process: Poly
CX-3000 Controller.
HITACHI / KOKUSAI DJ-825V is a diffusion furnace and accessorie applied in semiconductor manufacturing. It features a compact design, and is capable of controlled oxide and nitride diffusions to electron devices. It has a compact body combined with a front loading cassette of 75 mm in width. With temperature control up to 1,200°C, this diffusion furnace is suitable for diffusion processes of small-scale items. The actual furnace is equipped with a single atmosphere box that can hold up to two cassettes. A roughing pump controls the gas stream through the diffusion furnace, to ensure homogeneous diffusion. The chamber can be gas-purged with nitrogen or other inert gases, while maintaining high heat treatments levels. The built-in mass flow rate controller stabilizes gas flow even under low temperature conditions, and can be operated under full computer control, allowing for precise control and feedback. The system is then connected to a vacuum pump for maintenance. HITACHI DJ-825V diffusion furnace is powered by a high-efficiency heater, working with a single-phase AC input of 200 VAC, 50/60 Hz. The heater automatically turns off for power saving, when the desired temperature is reached. The furnace also features a "Heating Rate Monitor", which helps to control the rate of heating up to the reaction temperature, preventing point contact thermal runaway phenomena. Furthermore, the machine is equipped with advanced safety features including over-temperature shut-off, gas shut-off, and ground fault alarms/interlocks, even when the heater is disconnected from the power source. In addition, the use of non-stratifying insulation material eliminates the risk of low temperature heat loss. For easy and safe operation, KOKUSAI DJ-825V diffusion furnace is equipped with a simple and easy-to-use control panel. An advanced multiple-output timer, as well as an auto-stopper are all included. Overall, DJ-825V diffusion furnace and accessorie is a powerful heat-treatment tool for small-scale processes in the semiconductor industry. With its superior energy-conservation, safety, and reliability, it is essential for obtaining superior electronic results.
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