Used HITACHI / KOKUSAI DJ-833V #9186179 for sale
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ID: 9186179
Wafer Size: 8"
Furnace, 8"
Open cassette
Mainframe
Utility box
Missing parts
Process: Poly H8.3.
HITACHI / KOKUSAI DJ-833V is a diffusion furnace & accessory specifically designed for the semiconductor industry. It is a high-end and purpose-built device that provides intricate and precise control over the temperature of the material being processed and ensures a reliable, safe and repeatable performance. Its unique design allows for optimum spacing between each of the components, allowing for superior control over the thermal environment. HITACHI DJ-833V was designed to process materials such as semiconductors & electronics at high temperatures eliminating any impurities. It is a vertical type furnace with a two-shell interior and front wall operated using a joystick for smooth loading and unloading. By vertical type, it means that the entire chamber is parallely positioned with respect to the loading and unloading door. The structure of this diffusion furnace helps to prevent the contamination of the processed materials and reduces the interference of process gases in the chamber. The furnace is equipped with an advanced downflow equipment, which efficiently maintains an optimal concentration of profile gases encouraging very stable & repeatable thermal uniformity. The temperature inside the chamber is regulated with high accuracy via an advanced digital FX Series Temperature Controller, which alone ensures tight control over temperature stability within the chamber. The temperature controller also has the ability to maintain steady airflow for better uniformity by controlling the air makeup at the thermal high-pressure zone. KOKUSAI DJ 833V also features a swing-type high-efficiency direct heater, with either quartz or quartz-coated tungsten filaments that generate an accurate & repeatable thermal process. This type of heater is highly recommended due to its excellent uniformity and fast recovery time. It is also protected with a monitoring system that inspects things like the temperature & heater coil states. The heater is internally insulated with vacuum-press Ceramics to make sure that it maintains a constant temperature and operates at a low-level noise level. Overall, HITACHI / KOKUSAI DJ 833V is a high-end diffusion furnace & accessory unit designed to reliably and accurately process materials such as semiconductors, IC chips and others. Its detailed and specially designed structure, combined with its advanced temperature control machine, allows for precise and repeatable performance at a temperature range of up to 1200°C.
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