Used HITACHI / KOKUSAI DJ-833V #9186180 for sale
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ID: 9186180
Wafer Size: 8"
Furnace, 8"
Open cassette
Main frame
Utility box
TEOS Box
Process: TEOS.
HITACHI / KOKUSAI DJ-833V is a diffusion furnace and accessory designed to provide reliable and precise process and monitoring control for all applications. It features a wide operating temperature range between 600° and 1500°C, allowing for quick temperature changes and reproducible results. It is designed to provide a homogeneous atmosphere within its chamber through rapid heat up and cool down capabilities, and its superior temperature uniformity provides excellent diffusion capabilities. The intelligent process control equipment of HITACHI DJ-833V features several pre-set and customizable programs designed to optimize thermal processes and simplify operation. Additionally, the system includes a specialized gas flow monitor with a dual-mode feature that accurately controls both a precise gas concentration as well as flow rate. The large chamber, with its five-sided interior quartz design, is capable of containing up to four stackable process wafers, and a manual wafer transfer mechanism can be integrated into the unit for easy wafer handling. The machine also features high-efficiency, low-noise forced cooling, ensuring a uniform temperature environment throughout the chamber. KOKUSAI DJ 833V is also designed for easy maintenance. It includes a tool cleaning program for the chamber wall, bottom, and process tube, and the asset can be upgraded through the use of an additional program update kit. Additionally, the model includes a superlative process monitoring equipment that incorporates both traditional systems and modern data logging technology to ensure a stable, reliable process. In conclusion, DJ-833V is an advanced diffusion furnace and accessory designed to provide unmatched precision and complete process control. Its superior temperature uniformity, process control system, large chamber size, and easy maintenance make it the ideal choice for all process and diffusion applications.
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