Used HITACHI / KOKUSAI Quixace DJ-1236VN-DF #293711268 for sale
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ID: 293711268
Wafer Size: 12"
Vintage: 2016
Vertical LPCVD Furnace, 12"
Heating element
(2) Port loaders
Power rack
Spare parts
Cables
2016 vintage.
Introduction: HITACHI / KOKUSAI Quixace DJ-1236VN-DF is a state-of-the-art diffusion furnace designed for precise and uniform thermal processing of semiconductor wafers. This advanced equipment is equipped with a range of innovative features and accessories that make it ideal for high-volume production environments requiring superior performance and reliability in the semiconductor industry. Key Features: HITACHI Quixace DJ-1236VN-DF diffusion furnace is a vertical furnace system with a top-loading configuration, providing easy access to the process chamber for wafer loading and unloading. The unit is equipped with a high-capacity boat loader that can accommodate multiple wafer carriers, maximizing throughput and efficiency. The furnace chamber is constructed of high-purity quartz material, ensuring excellent thermal insulation and resistance to chemical reactions, thereby minimizing contamination and ensuring high-purity processing. The machine features a robust gas delivery tool with precise mass flow controllers for accurate control of the process gas flow rates, enabling precise control of the process conditions. KOKUSAI Quixace DJ-1236VN-DF diffusion furnace is equipped with a high-performance heating asset that enables rapid ramp-up and ramp-down of temperatures, ensuring fast and efficient processing of wafers. The model features a multi-zone heating configuration with independent temperature control of each heating zone, allowing for precise temperature uniformity across the wafer surface. Process Control and Monitoring: Quixace DJ-1236VN-DF diffusion furnace is equipped with a sophisticated process control equipment that allows for precise control of the process parameters, including temperature, gas flow rates, and ramp rates. The system features an intuitive user interface that allows for easy programming of process recipes and monitoring of process parameters in real-time. The unit is equipped with advanced temperature control algorithms and feedback mechanisms that ensure precise temperature control and uniformity across the wafer surface. The machine also features an integrated safety interlock tool that ensures safe operation of the furnace and protects the asset from potential hazards. Accessories and Options: HITACHI / KOKUSAI Quixace DJ-1236VN-DF diffusion furnace is available with a range of accessories and options to enhance its capabilities and tailor it to specific process requirements. Optional features include a load lock chamber for automated wafer handling, a vacuum pump model for process chamber evacuation, and a wafer mapping equipment for monitoring wafer position and temperature during processing. The system can be configured with various process gas delivery options, including dopant gas sources and carrier gas control modules, to enable a wide range of diffusion processes. The unit can also be equipped with an advanced wafer tracking machine that enables traceability of wafers throughout the processing cycle. Conclusion: In conclusion, HITACHI Quixace DJ-1236VN-DF diffusion furnace is a high-performance tool that offers precision, reliability, and efficiency in the processing of semiconductor wafers. With its advanced features, intuitive user interface, and range of accessories, this asset is ideal for high-volume production environments requiring superior performance and control in thermal processing applications in the semiconductor industry.
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