Used KE DD-1223V #9381846 for sale
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ID: 9381846
Wafer Size: 12"
Vintage: 2001
Furnace, 12"
Process: Pyro
(100) Process wafers
Process type: Oxide
Gas supply: Bottom
PCW Supply: Bottom
Boat operation: 1 Boat
(25) Carrier slots
Heater type: D4EX16975-1
Gases: N2, O2, H2, HCl
Hard Disk Drive (HDD)
System control:
CX3002C Main controller
Operation screen: Touch screen
Gas flow chart (Front, rear)
CQ1600 Temperature controller
Pressure control: EPV100-AW
Controller power: Ø1 208V 150A
Heater power: Ø3 208V 350A
Tape heater controller: SR Mini
Torch
Process gases:
Gas name / Type
Gas 1 / N2 FC-D986Y-BF 30SLM
Gas 2 / N2 FC-D986Y-BF 50SLM
Gas 3 / O2 FC-D986Y-BF 20SLM
Gas 4 / O2 FC-D985Y-BF 5SLM
Gas 5 / H2 FC-D986Y-BF 20SLM
Gas 6 / Hcl FC-D985Y-BF 0.5SLM
Gas 7 / N2 FM-D866Y-BF 10SLM
Gas 8 / N2 FM-D866Y-BF 5SLM
Gas distribution system:
Basic style: FUJIKIN IGS
Tubing material: SUS-316L
Tubing finish: VCR
FUJIKIN Manual valve
FUJIKIN Air operated valve
AP TECH Regulator
MFC (Maker, model): AERA
Exhaust distribution system:
APC EPV-100
Wafer / Cassette handling:
(16) Cassette storages
Cassette in / Out port
Cassette handling robot
Wafer transfer type: 1+4
Fork material: Ceramic
(5) Forks
Fork variable pitch
Fork wafer presence sensor
Elevator handling:
Boat elevator
Auto shutter
Boat rotation
Mechanical parts
Heating chamber:
D4EX16975-1 Heater
Spike T/C
Overtemp protect T/C
Door interlock
Exhaust system:
Heater exhaust
Gas box exhaust
Process exhaust
ETC:
Handy terminal
Manifold assembly
Cap base assembly
Tube setting part assembly
Missing parts:
Scavenser EXH MS3 Sensor
Torch TC
2001 vintage.
KE DD-1223V diffusion furnace and accessories is a versatile, temperature-controlled electric baking furnace equipment designed for use in scientific and industrial research and development. With high temperature capability, wide temperature range, with fine incremental control from 200°C up to 1000°C and a continuous output of up to 24 watts/cm2, it offers reliable performance, efficiency and safety for many industrial heating processes. The unit features a compact housing and a secure, insulated design, making it easy to install and maintain. A precise, digital temperature controller with PID control ensures consistent and repeatable heating operations. The oven is constructed with double-walled mineral insulation, providings excellent temperature uniformity and superior energy efficiency. The unit utilizes a unique "open-door" type design, making it easy to access for loading and unloading of parts being heated, and for servicing and maintaining the system. The chamber is designed for diffusion processes up to and including brazing and soldering. The doors are designed with a unique "swivel-style" that allows for easy access and additional flexibility. The entire unit is made with high-grade materials. A variety of furnace accessories are available for DD-1223V, including a quartz tube holder and quartz tube, which allow for precise quartz testing. A wide variety of crucibles and dishes can also be used, with temperatures up to 1000°C, making it possible to conduct a variety of sample preparation and analysis processes. Additional features include a double window type door opening machine, with a manual torque knob for easy access and maintenance, and an adjustable, PID-controlled temperature setting tool. KE DD-1223V diffusion furnace and accessories is an ideal solution for many industrial and scientific heating processes, offering unmatched performance, robust construction, and reliable temperature control. It is perfect for testing, preparatory processing, and analytical processes involving a variety of metals and alloys, as well as quartz, porcelain, and ceramic. With its easy to install design, efficient insulation, precise digital temperature controller, and a variety of accessories, DD-1223V is a powerful solution for any diffusion process.
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