Used KOKUSAI / BTI Apogee II+ #293651754 for sale

KOKUSAI / BTI Apogee II+ is a state-of-the-art diffusion furnace and accessory equipment designed for fabrication of advanced semiconductor devices. It features a high-end thermal control system, enabling the user to precisely manage the temperature during diffusion processes. The advanced temperature control unit allows temperatures up to 1350°C to be reached in a matter of minutes. The machine also has a wide dynamic range, enabling rapid heating and cooling of a wide variety of materials. The tool is also equipped with a high-efficiency gas delivery asset for gas delivery processes such as etchback and CVD. The model comes with several advanced tools such as a diffusion process monitor and a Decaperf Plus controller. The diffusion process monitor measures real-time substrate temperature and gas flow, enabling real-time optimization of the diffusion process. The Decaperf Plus controller is an automated device used to continuously monitor the temperature profile throughout the diffusion cycle. The equipment also includes an automatic wafer transfer system with an integrated wafer holder and wafer chucking unit. The machine is designed to handle a variety of substrates and can accommodate up to 8-inch wafers. It also has an advanced multi-zone heating tool, enabling the user to precisely control the temperature in different areas of the process chamber. The asset also features a vacuum model for improved process control, along with a vacuum protection equipment for enhanced safety. It also comes with various accessories such as a nitrogen line, which allows nitrogen-based etching processes to be operated. BTI Apogee II+ is an ideal system for semiconductor device fabrication and advanced diffusion processes. It provides excellent temperature control and gas delivery capabilities, enabling a variety of processes to be performed in a safe, efficient manner. Additionally, its advanced tooling and automated wafer transfer, combined with its multi-zone heating unit and advanced vacuum protection, can help ensure that all processes are done correctly, with minimal risk of damage to exposed substrates.