Used KOKUSAI CX-3000 #293762870 for sale
URL successfully copied!
ID: 293762870
Wafer Size: 12"
Vintage: 2004
Diffusion furnace, 12"
Part number: DD-1223V
Process: H2 Anneal
Main controller: CX3010 / CX3010B
Power supply: 208 V, 1 Phase / 440 V, 3 Phase
2004 vintage.
KOKUSAI CX3000 is a sophisticated and highly advanced diffusion furnace equipment designed to provide precise and efficient thermal processing for semiconductor manufacturing applications. This state-of-the-art system integrates a range of features and technologies to ensure reliable and consistent performance in a cleanroom environment. At the core of KOKUSAI CX-3000 is a high-performance diffusion furnace chamber that is capable of achieving and maintaining extremely tight temperature control for the diffusion process. The unit is equipped with multiple heating elements distributed throughout the chamber to ensure uniform temperature distribution and precise thermal profiling. This allows for the precise control of the temperature gradients and ramp rates required for various diffusion processes, such as phosphorous or boron diffusion. CX3000 features a sophisticated gas delivery machine that enables the introduction of the precise mixtures of dopant gases required for the diffusion process. The tool is equipped with high-precision mass flow controllers that enable accurate and repeatable control of gas flow rates, ensuring the proper concentration of dopant gases in the chamber. This precise control is essential for achieving the desired dopant profiles in the semiconductor wafers being processed. In addition to its precise thermal and gas control capabilities, CX-3000 is equipped with advanced automation and process control features that streamline operation and enhance productivity. The asset is interfaced with a user-friendly control interface that allows operators to easily set up and monitor process parameters, as well as to store and recall process recipes for efficient operation. This automation capability also includes advanced diagnostics and logging functions that enable real-time monitoring of model performance and facilitate proactive maintenance. Moreover, KOKUSAI CX3000 is designed with an emphasis on safety and reliability, with robust construction and fail-safe systems that ensure the integrity of the diffusion process and protect both the equipment and the operators from potential hazards. The system is equipped with comprehensive safety interlocks and alarms that detect and respond to abnormal conditions, such as over-temperature or gas leaks, to prevent accidents and ensure the integrity of the semiconductor processing environment. KOKUSAI CX-3000 is also designed with flexibility and scalability in mind, with options for customization and integration with other semiconductor manufacturing equipment. The unit can be configured with additional accessories, such as load lock chambers, wafer handling systems, and process monitoring tools, to create a fully integrated semiconductor processing line tailored to the specific needs of the customer. In conclusion, CX3000 is a cutting-edge diffusion furnace machine that combines advanced technologies, precise control capabilities, and robust design to deliver reliable and efficient thermal processing for semiconductor manufacturing applications. With its high-performance features and flexibility, CX-3000 is an ideal solution for semiconductor manufacturers looking to achieve high-quality and high-yield semiconductor devices.
There are no reviews yet