Used KOKUSAI CX-3000 #293762955 for sale

KOKUSAI CX-3000
ID: 293762955
Wafer Size: 12"
Vintage: 2006
Diffusion furnace, 12" P/N: DJ-1223VN Process: ALD SIN Main controller: CX3010 / CX3010B Power supply: 208 V, 1 Phase / 440 V, 3 Phase 2006 vintage.
KOKUSAI CX3000 is a state-of-the-art diffusion furnace equipment designed specifically for semiconductor manufacturing processes. This advanced system offers a wide range of capabilities and features, making it ideal for high-volume production environments that require precise and consistent processing of wafers. KOKUSAI CX-3000 is optimized for efficiency and reliability, ensuring that manufacturers can meet their production targets with minimal downtime and maximum output. One of the key features of CX3000 is its high-temperature capability, allowing the unit to reach temperatures up to 1200°C. This enables the machine to perform a variety of high-temperature processes, such as oxidation, diffusion, and annealing, with exceptional precision and control. CX-3000 is equipped with multiple heating zones and advanced thermal management technologies to ensure uniform heating across the wafer surface, resulting in consistent process results and high device performance. In addition to its high-temperature capabilities, KOKUSAI CX3000 offers a wide range of process gases and configurations to support various manufacturing requirements. The tool is compatible with a variety of gases commonly used in semiconductor processing, including oxygen, nitrogen, and dopant gases. KOKUSAI CX-3000 also features a robust gas delivery asset with precise flow control capabilities, ensuring accurate and repeatable gas flow rates throughout the process cycle. Another notable feature of CX3000 is its advanced automation and control model, which enables seamless integration with fab-wide manufacturing execution systems (MES) and process control systems (PCS). The equipment is equipped with a user-friendly interface and intuitive software, allowing operators to easily program and monitor process recipes, make real-time adjustments, and track system performance parameters. CX-3000 also features comprehensive data logging and reporting capabilities, enabling manufacturers to analyze process data and optimize production throughput. KOKUSAI CX3000 is a highly configurable unit that can be customized to meet specific manufacturing requirements and process needs. The machine offers a range of wafer sizes and loading configurations, including batch and single-wafer processing options. The tool can also be equipped with a variety of accessories and peripheral devices, such as wafer handling robots, load locks, and gas cabinets, to further enhance its functionality and versatility. In summary, KOKUSAI CX-3000 is a versatile and reliable diffusion furnace asset that is well-suited for high-volume semiconductor manufacturing environments. With its high-temperature capabilities, precise gas control, advanced automation, and flexible configuration options, CX3000 offers manufacturers a powerful solution for achieving optimal process performance, high device yield, and superior product quality.
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