Used KOKUSAI CX-3000 #293762962 for sale
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ID: 293762962
Wafer Size: 12"
Vintage: 2015
Diffusion furnace, 12"
P/N: DJ-1223VN
Process: ALD SIN
Main controller: CX3010 / CX3010B
Power supply: 208 V, 1 Phase / 440 V, 3 Phase
2015 vintage.
KOKUSAI CX3000 is a versatile and high-performance diffusion furnace designed for semiconductor manufacturing processes. It is a crucial tool in the production of reliable and high-quality electronic devices, as it facilitates the controlled diffusion of dopants into silicon wafers to achieve specific electrical properties necessary for integrated circuits. At the heart of KOKUSAI CX-3000 is a horizontal tube furnace equipment that provides a controlled thermal environment for the diffusion process. The system consists of multiple heating zones, each individually controlled to achieve precise temperature profiles across the wafer surface. This allows for uniform dopant distribution and consistent electrical characteristics in the final semiconductor devices. CX3000 is equipped with advanced gas delivery and handling systems to introduce dopant gases and other process gases into the furnace chamber. Precise flow control mechanisms ensure the accurate deposition of dopants onto the wafer surface, while gas purging systems maintain a clean and stable process environment free of contaminants that could adversely affect device performance. The furnace chamber itself is made of high-purity quartz or other suitable materials that can withstand the high temperatures required for the diffusion process. The chamber is designed to accommodate multiple wafers simultaneously, increasing process throughput and efficiency. Special care is taken to minimize particle contamination and ensure the cleanliness of the processing environment, as even minor impurities can negatively impact device yield and reliability. Key to the performance of CX-3000 is its advanced control unit, which allows for precise programming of temperature profiles, gas flow rates, and other process parameters. Operators can create custom recipes tailored to specific diffusion requirements, optimizing the process for different dopant types, wafer sizes, and device structures. Real-time monitoring and feedback mechanisms ensure process stability and consistency, enabling high yields and reproducibility in production. In addition to the main furnace unit, KOKUSAI CX3000 can be equipped with a range of accessories and options to enhance its capabilities and versatility. These include additional gas lines for multigas processes, wafer-handling systems for automated loading and unloading, and in-situ monitoring tools for process characterization and control. Optional features such as rapid thermal annealing capabilities, vacuum processing, and custom process chambers further extend the furnace's functionality for a wide range of semiconductor applications. Overall, KOKUSAI CX-3000 stands out as a reliable and high-performance diffusion furnace machine that meets the demanding requirements of modern semiconductor manufacturing. Its precise control, advanced features, and robust design make it an essential tool for achieving the high-quality, high-performance semiconductors required in today's electronic devices.
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