Used KOKUSAI CX-3000 #293762965 for sale

KOKUSAI CX-3000
ID: 293762965
Wafer Size: 12"
Vintage: 2007
Diffusion furnace, 12" P/N: DJ-1206V -DF Process: SI3N4 Main controller: CX3010 / CX3010B Power supply: 100V, 1 Phase / 400 V, 3 Phase 2007 vintage.
KOKUSAI CX3000 is a cutting-edge diffusion furnace designed for the precise and efficient thermal processing of substrates used in semiconductor manufacturing. This advanced equipment is equipped with state-of-the-art technology and features that enable high-performance diffusion processes while ensuring exceptional control and repeatability. KOKUSAI CX-3000 system consists of several key components that work together to create a controlled environment for diffusion processes. The main chamber of the furnace is constructed from high-quality materials that provide excellent thermal stability and uniform heat distribution. This ensures that the substrates are exposed to consistent temperatures throughout the process, resulting in precise doping profiles and high device performance. One of the standout features of CX3000 is its advanced heating unit, which utilizes radiant heating elements to achieve rapid and uniform heating of the substrates. This allows for quick ramp-up times and tight temperature control, reducing process variability and ensuring high-quality results. Additionally, the machine is equipped with advanced temperature monitoring and control mechanisms that continuously adjust the heating elements to maintain the desired process conditions. In addition to its superior heating capabilities, CX-3000 offers a range of innovative features that further enhance its performance and versatility. The tool is equipped with a precision gas delivery asset that enables the accurate control of dopant gases and carrier gases during the diffusion process. This ensures that the desired dopant profiles are achieved with high reproducibility, leading to consistent device performance. Furthermore, KOKUSAI CX3000 includes an advanced process control model that allows for the customization of process recipes and parameters to meet specific requirements. Operators can easily program and adjust the temperature profiles, gas flow rates, and other process parameters through a user-friendly interface, enabling the optimization of diffusion processes for different substrates and applications. KOKUSAI CX-3000 is also designed with productivity and ease of use in mind. The equipment features a high-throughput design that allows for the processing of multiple substrates simultaneously, increasing productivity and throughput. Additionally, the system is equipped with automated loading and unloading mechanisms, reducing manual handling and streamlining the process flow. Overall, CX3000 is a versatile and high-performance diffusion furnace that offers exceptional control, repeatability, and productivity for semiconductor manufacturing applications. With its advanced technology, innovative features, and user-friendly design, this unit is well-suited for a wide range of diffusion processes, enabling semiconductor manufacturers to achieve high-quality results with efficiency and precision.
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