Used KOKUSAI CX-3000 #293762972 for sale
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ID: 293762972
Wafer Size: 12"
Diffusion furnace, 12"
P/N: DD-1223VN
Process: SI3N4
Main controller: CX3010 / CX3010B
Power supply: 208V, 1 Phase / 440 V, 3 Phase.
KOKUSAI CX3000 is a cutting-edge diffusion furnace designed for high-performance semiconductor manufacturing processes. This advanced equipment offers precise control over temperature, pressure, and gas flow to ensure uniform and reproducible film deposition on wafer substrates. KOKUSAI CX-3000 is equipped with advanced heating elements and gas delivery systems, making it ideal for both research and production applications in the semiconductor industry. CX3000 features a high-temperature tube furnace that can reach temperatures up to 1200°C, allowing for the deposition of a wide range of thin films and layers. The tube furnace is constructed of high-quality quartz material, which ensures excellent thermal stability and uniform temperature distribution across the wafer surface. This design feature is essential for achieving consistent and reliable film properties across multiple wafers in a single batch. Furthermore, CX-3000 is equipped with a sophisticated gas delivery system that enables precise control over the flow rates of various process gases, such as dopants, oxidants, and precursors. This level of control is essential for tailoring the deposition process to meet specific material requirements and device performance specifications. The advanced gas delivery unit also minimizes gas consumption and ensures a clean process environment, resulting in high-quality film deposition with minimal impurities. In addition to its sophisticated heating and gas delivery systems, KOKUSAI CX3000 features an intuitive user interface that allows operators to program and monitor the deposition process with ease. The machine is equipped with a touchscreen display, enabling operators to set temperature profiles, gas flow rates, and other process parameters with precision. The user-friendly interface also includes real-time monitoring and data logging functionalities, which provide operators with valuable insights into the deposition process and enable quick troubleshooting and optimization of process conditions. KOKUSAI CX-3000 can accommodate wafer sizes up to 300mm, making it suitable for a wide range of semiconductor manufacturing applications, including logic devices, memory devices, and power devices. The tool is compatible with various wafer materials, such as silicon, gallium arsenide, and silicon carbide, allowing for versatile deposition capabilities across different semiconductor material platforms. CX3000 also offers flexibility in process customization, enabling operators to develop and optimize deposition processes for specific device requirements and performance targets. Overall, CX-3000 is a state-of-the-art diffusion furnace that combines advanced technology, precise control, and user-friendly operation to deliver high-performance film deposition for semiconductor manufacturing applications. With its robust design, versatile capabilities, and intuitive interface, KOKUSAI CX3000 is a valuable tool for researchers and semiconductor manufacturers seeking to develop next-generation devices with superior performance and reliability.
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