Used KOKUSAI CX-3000 #293762980 for sale
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ID: 293762980
Wafer Size: 12"
Vintage: 2007
Diffusion furnace, 12"
P/N: DD-1223VN
Process: HTO
Main controller: CX3010 / CX3010B
Power supply: 120V, 1 Phase / 480 V, 3 Phase
2007 vintage.
KOKUSAI CX3000 is a high-performance diffusion furnace and accessory equipment designed for semiconductor manufacturing processes. This advanced piece of equipment incorporates state-of-the-art technologies to provide precise control and uniformity over the diffusion process, resulting in superior quality and efficiency in the production of semiconductor devices. KOKUSAI CX-3000 features a horizontal design, allowing for easy loading and unloading of wafers, as well as maximizing the processing capacity of the furnace. The system is equipped with a high-temperature quartz tube that ensures uniform heat distribution along the entire length of the wafer, resulting in consistent and reliable processing results. One of the key highlights of CX3000 is its advanced heating unit, which utilizes a combination of radiant and convection heating elements to achieve rapid and precise temperature control. This enables the furnace to reach and maintain the desired processing temperatures quickly and accurately, minimizing cycle times and enhancing overall productivity. In addition to its superior heating capabilities, CX-3000 is equipped with a comprehensive gas delivery machine that allows for precise control of the ambient atmosphere within the furnace. This tool includes mass flow controllers, pressure regulators, and gas lines that ensure the accurate and consistent delivery of process gases, such as dopants and carrier gases, to create the desired diffusion environment. KOKUSAI CX3000 also features an advanced temperature monitoring and control asset that utilizes thermocouples and temperature sensors to continuously monitor and adjust the furnace temperature throughout the diffusion process. This real-time feedback model ensures that the wafer is subjected to the correct temperature profile, leading to precise and repeatable diffusion results. Furthermore, KOKUSAI CX-3000 is equipped with a comprehensive data logging and analysis equipment that allows operators to track and analyze key process parameters in real time. This system provides valuable insights into the performance of the furnace, enabling users to optimize process settings and improve overall productivity and yield. To ensure the safety and reliability of the equipment, CX3000 is equipped with a range of safety features, including emergency shut-off mechanisms, over-temperature protection, and gas leak detection systems. These features help to prevent accidents and ensure the smooth and secure operation of the diffusion furnace. Overall, CX-3000 is a cutting-edge diffusion furnace unit that offers exceptional precision, control, and reliability for semiconductor manufacturing processes. With its advanced technologies and comprehensive design, this equipment is ideal for high-volume production environments where quality, efficiency, and process consistency are paramount.
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