Used KOKUSAI CX-3000 #293762992 for sale

KOKUSAI CX-3000
ID: 293762992
Wafer Size: 12"
Vintage: 2005
Diffusion furnace, 12" P/N: DD-1223V Process: BIO Main controller: CX3010 / CX3010B Power supply: 208V, 1 Phase / 440 V, 3 Phase 2005 vintage.
KOKUSAI CX-3000 is a high-performance diffusion furnace equipment designed for precise and uniform thermal processing of semiconductor materials. This cutting-edge system is equipped with advanced features and accessories that enable efficient and reliable operation in a variety of semiconductor manufacturing applications. One of the key features of KOKUSAI CX3000 is its high-temperature capabilities, which allow for the processing of a wide range of semiconductor materials at temperatures up to 1200°C. This capability is crucial for achieving the desired material properties and performance in semiconductor devices. The furnace chamber is carefully designed to ensure excellent temperature uniformity across the wafer, resulting in consistent and repeatable processing outcomes. CX-3000 is equipped with a state-of-the-art temperature control unit that ensures precise temperature control throughout the entire process. This advanced control machine allows for tight temperature tolerances, minimizing temperature fluctuations and ensuring uniform processing across the entire wafer surface. The tool is also capable of rapid heating and cooling rates, allowing for fast cycle times and high throughput in semiconductor fabrication. In addition to its temperature control capabilities, CX3000 features a high-purity gas delivery asset that is essential for creating the desired process atmosphere within the furnace chamber. The model is designed to deliver precise amounts of gases such as oxygen, nitrogen, and dopant gases to control the oxidation, diffusion, and deposition processes during semiconductor fabrication. The gas delivery equipment is equipped with mass flow controllers and pressure regulators to maintain tight control over the gas flow rates and pressures, ensuring accurate and reproducible processing conditions. KOKUSAI CX-3000 also comes with a range of accessories and options to enhance its functionality and versatility. The system can be configured with multiple wafer carriers to accommodate different wafer sizes and types, allowing for flexibility in processing various semiconductor substrates. In addition, the unit can be equipped with a range of process monitoring and control tools, such as in-situ temperature and gas concentration sensors, to enable real-time monitoring and adjustment of process parameters. Furthermore, KOKUSAI CX3000 is designed with user-friendly interfaces and software tools to simplify operation and maximize productivity. The machine features a touchscreen control panel that provides easy access to key tool parameters and settings, allowing operators to configure and monitor the process with ease. The asset software also supports recipe management and data logging capabilities, enabling the storage and retrieval of process recipes for consistent and reproducible processing. Overall, CX-3000 is a versatile and reliable diffusion furnace model that offers exceptional performance and control capabilities for semiconductor manufacturing applications. With its advanced features, high-temperature capabilities, precise temperature control, and user-friendly interface, CX3000 is a valuable tool for achieving high-quality semiconductor devices with superior performance and reliability.
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