Used KOKUSAI CX-3000 #293763084 for sale
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ID: 293763084
Wafer Size: 8"
Diffusion furnace, 8"
Part number: DJ-1206VN-DM
Main controller: CX3001
Process: Nitride
Power supply: 120 V, Single phase / 208 V, 3 Phase.
KOKUSAI CX-3000 is a state-of-the-art diffusion furnace and accompanying accessories designed for high-performance semiconductor manufacturing processes. This advanced equipment offers superior control over temperature, gas flow, and process conditions to ensure precise and reproducible results in the fabrication of semiconductor devices. At the core of KOKUSAI CX3000 is the diffusion furnace itself, which is a high-temperature chamber capable of heating wafers to temperatures up to 1200 degrees Celsius. This furnace is equipped with multiple heating zones to provide uniform temperature distribution across the wafer surface, essential for achieving consistent and reliable diffusion processes. The furnace is constructed from high-quality materials, such as quartz tubes and silicon carbide heating elements, to withstand the high temperatures and corrosive gases typically used in semiconductor processing. This robust construction ensures long-term reliability and minimal downtime for maintenance. To facilitate the diffusion process, CX-3000 is equipped with a sophisticated gas delivery system that precisely controls the flow rates of dopant gases, oxidizing agents, and inert gases needed for the desired diffusion profiles. The unit allows for easy setup and calibration of gas flow rates, ensuring accurate and repeatable process control. In addition to the core diffusion furnace, CX3000 comes with a range of accessories to enhance its capabilities and flexibility in semiconductor manufacturing. These accessories include a wafer loading and unloading machine, a quartz boat loader for efficient wafer handling, and a waste gas abatement tool to safely vent process by-products. KOKUSAI CX-3000 also features advanced process control software that enables users to program and monitor the diffusion process with precision. The software offers a user-friendly interface for setting up process recipes, monitoring key parameters in real-time, and analyzing process data for quality control and optimization. Furthermore, KOKUSAI CX3000 includes safety features such as over-temperature protection, gas leak detection, and emergency shutdown procedures to ensure a safe operating environment for semiconductor manufacturing personnel. Overall, CX-3000 is a cutting-edge diffusion furnace asset that delivers industry-leading performance, reliability, and process control for demanding semiconductor manufacturing applications. With its advanced features, robust construction, and comprehensive accessories, CX3000 is an ideal choice for semiconductor manufacturers seeking high-quality diffusion solutions for their production needs.
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