Used KOKUSAI CX-3000 #293763091 for sale
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ID: 293763091
Wafer Size: 8"
Diffusion furnace, 8"
Part number: DJ-835V 8BL
Main controller: CX3001
Process: D-POLY
Power supply: 120 V, Single phase / 208 V, 3 Phase.
KOKUSAI CX-3000 is a state-of-the-art diffusion furnace equipment designed for high-performance semiconductor manufacturing processes. It is equipped with advanced features and accessories that enable precise control over the diffusion process, ensuring consistent and uniform diffusion profiles for high-yield production. KOKUSAI CX3000 furnace is designed to accommodate a wide range of process gases, including dopant species such as arsenic, phosphorus, and boron, as well as inert gases like nitrogen and argon. This flexibility allows for a variety of diffusion processes to be performed within the same system, making it ideal for multi-step semiconductor fabrication processes. One of the key features of CX-3000 is its high-temperature capability, with the furnace able to reach temperatures up to 1200°C. This high-temperature capability is essential for driving dopant atoms into the semiconductor substrate, ensuring the formation of well-defined and controlled doping profiles. Additionally, CX3000 utilizes a rapid thermal annealing (RTA) process that allows for quick heating and cooling cycles, minimizing process time and improving productivity. The furnace chamber of KOKUSAI CX-3000 is equipped with multiple gas inlet ports, allowing for precise control over the flow rates and compositions of process gases. This enables users to tailor the diffusion process to their specific requirements, achieving optimal doping profiles and minimizing defects in the semiconductor material. The chamber is also designed to ensure uniform gas distribution, preventing gas concentration gradients that can lead to non-uniform doping profiles. To further enhance the diffusion process, KOKUSAI CX3000 is equipped with a range of accessories that enable enhanced process control and monitoring. These accessories include gas flow controllers, mass flow meters, and pressure gauges, allowing users to precisely adjust process parameters in real-time. Additionally, the unit is equipped with a sophisticated temperature monitoring and control machine that ensures stable and accurate temperature profiles throughout the process. CX-3000 also features a user-friendly interface that allows for easy programming and operation of the diffusion process. The tool is equipped with a touchscreen display and intuitive software that enables users to create custom process recipes, monitor process parameters, and analyze data in real-time. This ease of use makes CX3000 suitable for both experienced semiconductor process engineers and entry-level technicians. In summary, KOKUSAI CX-3000 is a cutting-edge diffusion furnace asset that offers superior performance, flexibility, and control for semiconductor manufacturing processes. With its high-temperature capability, precise gas control, and advanced accessories, KOKUSAI CX3000 enables users to achieve consistent and uniform diffusion profiles, leading to high-quality semiconductor devices with improved performance and reliability.
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