Used KOKUSAI CX-3000 #293763104 for sale
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ID: 293763104
Wafer Size: 8"
Diffusion furnace, 8"
Part number: DJ-835V 8BL
Main controller: CX3001
Process: D-POLY
Power supply: 120 V, Single phase / 208 V, 3 Phase.
KOKUSAI CX-3000 diffusion furnace is a versatile and advanced piece of equipment used in the semiconductor industry for thermal processing applications. It is designed to provide precise and uniform heating and diffusion processes essential for the fabrication of various semiconductor devices. KOKUSAI CX3000 features a vertical batch-type configuration, making it ideal for high-volume production environments. The furnace chamber is constructed of high-quality quartz material, which ensures excellent thermal insulation and resistance to chemical reactions. This design also allows for optimal temperature distribution throughout the chamber, leading to consistent and reliable processing results. One of the key capabilities of CX-3000 is its ability to perform a wide range of thermal processes, including oxidation, diffusion, annealing, and LPCVD (low-pressure chemical vapor deposition). These processes are essential for creating the desired electrical and structural properties in semiconductor materials. CX3000 is equipped with a precise temperature control equipment that allows users to set and maintain specific temperature profiles during processing. This level of control is crucial for achieving the desired material properties and device performance. The system is capable of reaching temperatures up to 1200°C, making it suitable for a wide range of semiconductor material processing requirements. In addition to its temperature control capabilities, KOKUSAI CX-3000 features a gas flow control unit that enables the precise introduction of various process gases into the chamber. This machine is essential for creating the desired chemical reactions during the processing steps, such as oxidation or deposition. KOKUSAI CX3000 also comes equipped with a wafer handling tool that allows for the loading and unloading of semiconductor wafers in a controlled manner. This feature ensures that the wafers are processed uniformly and efficiently, minimizing potential defects and variations in device performance. To enhance the functionality of CX-3000, various accessories are available that can be integrated with the furnace. These accessories include gas distribution systems, vacuum systems, and exhaust systems, among others. These additional components further expand the capabilities of the furnace and enable users to tailor the asset to their specific processing requirements. Overall, CX3000 diffusion furnace is a highly advanced and reliable tool for semiconductor processing applications. Its precise temperature control, gas flow management, and wafer handling capabilities make it an essential piece of equipment for semiconductor fabrication facilities looking to achieve high-quality and uniform device performance. With its versatility and reliability, KOKUSAI CX-3000 is a valuable investment for companies seeking to stay at the forefront of semiconductor technology development.
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