Used KOKUSAI CX-3000 #293763107 for sale
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ID: 293763107
Wafer Size: 8"
Diffusion furnace, 8"
Part number: DJ-835V 8BL
Main controller: CX3001
Process: Nitride
Power supply: 120 V, Single phase / 208 V, 3 Phase.
KOKUSAI CX-3000 is a state-of-the-art diffusion furnace and associated accessories that are designed to meet the advanced processing needs of semiconductor manufacturers. This high-performance equipment offers a range of cutting-edge features and capabilities to enable precise and efficient processing of silicon wafers for various semiconductor applications. With a focus on reliability, repeatability, and productivity, KOKUSAI CX3000 is an essential tool for achieving high-quality results in semiconductor fabrication. At the core of CX-3000 system is the diffusion furnace, a critical component for creating precise dopant profiles in silicon wafers. The furnace is equipped with multiple heating zones and gas injection systems to facilitate the controlled diffusion of dopants into the silicon substrate. This enables the customization of electrical properties in the wafer to meet the specific requirements of the desired semiconductor device. CX3000 features advanced temperature control mechanisms to ensure uniform heating and cooling of the wafers during the diffusion process. This precise temperature control is essential for achieving consistent dopant profiles across the wafer surface and minimizing variations in electrical properties. The unit is equipped with high-quality thermocouples and heating elements to maintain temperature accuracy within tight tolerances throughout the processing cycle. In addition to temperature control, KOKUSAI CX-3000 offers precise gas flow control capabilities for accurate dopant introduction into the diffusion furnace. The machine features mass flow controllers and advanced gas handling systems to provide precise control over the flow rates of dopant gases such as boron, phosphorus, and arsenic. This enables the deposition of dopants at specific concentrations and depths within the silicon wafer to meet the desired electrical specifications. To enhance productivity and efficiency, KOKUSAI CX3000 is designed with automation features that streamline the processing workflow and minimize manual intervention. The tool is equipped with a user-friendly interface and software control asset that allows for easy programming of process recipes and monitoring of key parameters in real-time. This automation capability reduces operator error, improves process repeatability, and accelerates overall processing times. To ensure the safety and reliability of the diffusion process, CX-3000 is equipped with comprehensive safety features and interlocks that prevent hazardous conditions and protect both the equipment and operators. The model is designed to meet industry safety standards and regulations, providing semiconductor manufacturers with peace of mind when operating the equipment in their cleanroom environments. In conclusion, CX3000 diffusion furnace and accessories are a cutting-edge solution for semiconductor manufacturers seeking to achieve precise dopant profiles and optimal electrical properties in silicon wafers. With its advanced temperature control, gas flow management, automation capabilities, and safety features, KOKUSAI CX-3000 offers a robust platform for high-quality semiconductor fabrication processes. By investing in KOKUSAI CX3000 system, semiconductor manufacturers can enhance their production capabilities, improve process efficiency, and deliver superior semiconductor devices to the market.
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