Used KOKUSAI CX-3000 #293763115 for sale

KOKUSAI CX-3000
ID: 293763115
Wafer Size: 8"
Diffusion furnace, 8" Part number: DJ-835V 8BL Main controller: CX3001 Process: SI3N4 Power supply: 120 V, Single phase / 208 V, 3 Phase.
KOKUSAI CX-3000 is a cutting-edge diffusion furnace designed for advanced semiconductor manufacturing processes. This high-performance equipment integrates state-of-the-art technologies and features to provide precise control and uniformity in diffusion processes, making it an ideal solution for mass production in the semiconductor industry. The main body of KOKUSAI CX3000 diffusion furnace is constructed using high-quality materials and designed with a focus on thermal efficiency and stability. The furnace chamber is made of a high-purity quartz tube that can withstand high temperatures and corrosive gases, ensuring excellent durability and reliability over extended periods of operation. The tube is heated by a set of high-powered resistance heaters that provide rapid and uniform heating throughout the chamber, achieving the desired process temperatures quickly and efficiently. CX-3000 is equipped with a sophisticated gas delivery system that allows for precise control of the process atmosphere within the furnace chamber. The unit features mass flow controllers (MFCs) for accurate and stable flow rate control of various process gases, such as dopant sources and carrier gases. This ensures consistent and repeatable process results, critical for achieving tight process tolerances required in modern semiconductor manufacturing. Temperature control in CX3000 diffusion furnace is achieved through an advanced temperature control machine that utilizes high-precision thermocouples and temperature controllers. These sensors continuously monitor the temperature inside the furnace chamber and make real-time adjustments to the heating parameters to maintain the desired temperature profile throughout the process. The tool also features thermal uniformity optimization capabilities to ensure that the wafer temperature remains uniform across the entire process area, minimizing variations in dopant concentration and improving overall process performance. KOKUSAI CX-3000 diffusion furnace is designed to accommodate various wafer sizes, ranging from small-scale research wafers to large-format production wafers used in high-volume manufacturing. The asset offers multiple wafer boat configurations and loading options to cater to different process requirements and production volumes. The wafer loading mechanism is designed for smooth and efficient wafer loading and unloading operations, minimizing cycle times and improving overall process throughput. To complement the operation of KOKUSAI CX3000 diffusion furnace, KOKUSAI offers a range of accessories and peripherals designed to enhance model performance and functionality. These accessories include gas purifiers, vacuum pumps, exhaust gas abatement systems, and process monitoring tools, all of which are seamlessly integrated with the main furnace equipment to provide a complete and robust solution for semiconductor processing. In conclusion, CX-3000 diffusion furnace represents a pinnacle of technological innovation in semiconductor manufacturing equipment. With its advanced features, precise control capabilities, and robust design, CX3000 is a versatile and reliable tool for meeting the demanding requirements of modern semiconductor fabrication processes.
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