Used KOKUSAI CX-3000 #293792523 for sale
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ID: 293792523
Wafer Size: 12"
Vintage: 2004
Diffusion furnace, 12"
Part number: DD-1223V
Process: H2 Anneal
2004 vintage.
KOKUSAI CX3000 is a highly advanced semiconductor processing equipment that combines a diffusion furnace with a range of accessories to provide a comprehensive solution for the fabrication of semiconductor devices. As a leading-edge tool in the field of semiconductor manufacturing, KOKUSAI CX-3000 offers unparalleled performance, reliability, and flexibility to meet the demanding requirements of the industry. At the heart of CX3000 is its diffusion furnace, which is designed to heat and process silicon wafers to facilitate the diffusion of dopant atoms into the substrate. The furnace features a high-temperature chamber capable of reaching temperatures up to 1200 degrees Celsius, ensuring precise control over the diffusion process. The furnace is equipped with a range of heating elements, gas delivery systems, and temperature control systems to provide uniform and consistent thermal processing across the wafer surface. In addition to the diffusion furnace, CX-3000 also includes a variety of accessories and subsystems to enhance its functionality and performance. These accessories may include a gas delivery system, a vacuum pump, a temperature control unit, and a wafer handling machine. The gas delivery tool is crucial for providing the necessary dopant gases during the diffusion process, while the vacuum pump helps create the desired processing environment within the furnace chamber. The temperature control asset of KOKUSAI CX3000 plays a critical role in ensuring the accuracy and stability of the diffusion process. By monitoring and adjusting the temperature of the furnace chamber in real-time, the temperature control model helps achieve the desired dopant profile and diffusion characteristics on the wafer surface. This level of temperature control is essential for producing high-quality and reliable semiconductor devices with consistent performance characteristics. Moreover, the wafer handling equipment of KOKUSAI CX-3000 enables automated loading and unloading of silicon wafers into the diffusion furnace, ensuring efficient and seamless processing. The wafer handling system may incorporate robotic arms, wafer carriers, and alignment mechanisms to safely transport wafers in and out of the furnace chamber. This feature not only improves the overall throughput of the unit but also reduces the risk of wafer contamination or damage during handling. In terms of performance, CX3000 excels in delivering precise and repeatable diffusion processes for a wide range of semiconductor applications. Its advanced control algorithms, real-time monitoring capabilities, and customizable process recipes allow semiconductor manufacturers to achieve tight control over the dopant concentration, diffusion depth, and junction profiles on the silicon wafers. This level of process control is essential for fabricating complex semiconductor devices with critical performance specifications. Overall, CX-3000 sets a new standard in diffusion furnace technology by offering a comprehensive solution for semiconductor processing. With its advanced features, high-performance capabilities, and robust design, KOKUSAI CX3000 is a versatile and reliable tool for semiconductor manufacturers looking to achieve high yields, precise process control, and consistent device performance.
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