Used KOKUSAI CX-3000 #9291193 for sale

KOKUSAI CX-3000
ID: 9291193
Wafer Size: 12"
Furnace, 12" P/N:DJ-1206VN-DM Process: ALD.
KOKUSAI CX-3000 is a cutting-edge diffusion furnace designed for semiconductor fabrication processes in the realm of microelectronics manufacturing. Developed by KOKUSAI Electric Corporation, a renowned Japanese manufacturer of semiconductor equipment, KOKUSAI CX3000 represents a new benchmark in high-performance diffusion furnaces, offering advanced features and innovative technologies tailored to meet the stringent requirements of modern semiconductor production facilities. CX-3000 is meticulously engineered to deliver precise and uniform thermal processing capabilities essential for doping processes like drive-in, oxidation, and annealing in semiconductor component manufacturing. With a maximum processing temperature of up to 1300°C, the furnace provides a versatile platform for a wide range of semiconductor materials including silicon, gallium arsenide, and other compound semiconductors. At the core of CX3000 is its high-temperature process chamber, which is crafted from robust materials that can withstand the extreme thermal stresses encountered during high-temperature processing. The chamber is surrounded by high-performance insulation to minimize heat loss and ensure exceptional thermal stability across the entire process cycle. This design feature enables precise control of temperature gradients and uniformity, crucial for achieving reproducible and reliable results in semiconductor fabrication. KOKUSAI CX-3000 is equipped with a state-of-the-art gas delivery equipment that enables controlled introduction of dopant gases and precursors into the process chamber. The system includes mass flow controllers for accurate regulation of gas flow rates, ensuring precise control of the doping process parameters. Additionally, the furnace features a sophisticated gas mixing unit that allows for customized gas mixtures tailored to specific process requirements, enabling flexibility in doping profiles and material characteristics. The diffusion furnace is further enhanced with advanced process monitoring and control capabilities to facilitate real-time process optimization and parameter adjustment. KOKUSAI CX3000 is equipped with a comprehensive suite of sensors and monitoring tools that provide detailed insights into crucial process parameters such as temperature, gas flow, and pressure. These data are collected and analyzed by a sophisticated control machine that employs advanced algorithms to maintain precise process conditions and ensure consistent performance throughout the processing run. In addition to its exceptional performance capabilities, CX-3000 is designed with a focus on operational efficiency and user convenience. The furnace features a user-friendly interface that enables intuitive operation and easy access to essential process parameters and controls. Furthermore, the furnace is equipped with remote monitoring and diagnostic capabilities, allowing for seamless integration into semiconductor manufacturing workflows and enabling proactive maintenance and troubleshooting. Overall, CX3000 diffusion furnace represents a pinnacle of technological innovation in semiconductor processing equipment. With its high-performance capabilities, advanced process control features, and user-friendly design, KOKUSAI CX-3000 is poised to address the evolving demands of the semiconductor industry and empower manufacturers to achieve new levels of efficiency, precision, and quality in their fabrication processes.
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