Used KOKUSAI CX-5000 #293762572 for sale
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ID: 293762572
Wafer Size: 12"
Vintage: 2010
Diffusion furnace, 12"
Part number: DJ-1206VN-DF
Process: TiN
Main controller: KDSC
Power supply: 120 V, 1 Phase / 480 V, 3 Phase
2010 vintage.
KOKUSAI CX-5000 is a diffusion furnace and accessories specifically designed for the production of semiconductor components. It offers a high level of efficiency and precision for application in the production of highly complex devices. CX-5000 is based on a vertical diffusion furnace design which provides an optimal range of temperature profiles for semiconductor component production. The modular design allows for the application of both low and high temperature operations while also providing an excellent degree of safety and control. Additionally, the furnace features a variety of furnace accessories that offer increased levels of automation and precision. The furnace is equipped with a dual-zone controller for both high temperature and low temperature processes. This provides the user with a greater range of processing capabilities as well as precise control over processing conditions. The furnace is also equipped with a safety shut off feature which can be activated when temperatures exceed pre-set limits. This ensures safety of operation and prevents overheating of components. KOKUSAI CX-5000 is designed to support structures from 0.2 to 0.6 microns in thickness, making it an ideal choice for the manufacture of smaller devices with closely controlled thermal profiles. The equipment is equipped with an integrated multi-zone clocking system which allows for precise timing and synchronization of implant processes. In addition, CX-5000 can be fully automated with programmable start and end temperature settings, allowing for consistent, repeatable results across numerous substrates. The unit is built with advanced features such as an automatic gas flow machine that can be configured for optimal temperature uniformity as well as pressure regulation and purge control. Other features include access to remote monitoring and control through Ethernet and RS-232 interfaces, as well as PC-based data logging. Finally, KOKUSAI CX-5000 is designed to provide the necessary flexibility for a wide variety of production processes. CX-5000 utilizes a variety of materials including quartz, SiC, SiNx, and polysilazanes which can be programmed for customization and process optimization. KOKUSAI CX-5000 supports a wide range of controllable parameters and offers process engineers a wide range of options for customization. This makes it an ideal choice for the production of complex devices.
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