Used KOKUSAI CX-5000 #293762973 for sale

KOKUSAI CX-5000 is a diffusion furnace and accessories package designed for high performance thin film deposition and annealing capabilities. It is a versatile equipment with excellent temperature control and accuracy, as well as easy-to-use operating controls. The unit also offers a large array of pre-programmed temperatures for a broad range of film deposition and process applications. CX-5000 is composed of a high performance thin film deposition chamber and a high temperature annealing quench chamber. The film deposition chamber is designed to deposit oxide, nitride, and metals films on a variety of substrates. The chamber features an ultra-high vacuum level of 10-5torr and an energy efficient electro-thermal quartz heaters and resistive heaters system. It also has a built-in gas feed-through unit for reactive gas introduction during the deposition process. The annealing chamber is designed for higher temperature processes, typically up to 1350℃. It offers a two-rate heating process that enables a sharper temperature rise and fall, along with excellent temperature uniformity and repeatability. The quench machine also features an automatic lid opener/closer and an array of pre-programmed cooling times. KOKUSAI CX-5000 also features a full set of accessories, including load locks, process controllers, and gas feed systems. The load locks are designed to allow quick substrate changeover between chambers. This reduces sampling time, allowing the operator to quickly switch samples and reduce process time. The process controllers are designed to provide precise temperature and time control of the process. This allows the operator to easily program and monitor the process variables such as temperature rise-rate, deposition time, and annealing time. In addition, CX-5000 includes a variety of safety features to ensure the operator's safety. For instance, the safety circuits include an over-temperature cutoff switch and alarms for over-current and over-pressure. Moreover, the unit is also equipped with several safety interlocks to prevent unexpected runaway processes. Overall, KOKUSAI CX-5000 is a reliable, robust diffusion furnace and annealing chamber, with the flexibility to perform a wide range of film deposition and annealing processes.