Used KOKUSAI CX-5000 #293762978 for sale
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ID: 293762978
Wafer Size: 12"
Vintage: 2008
Diffusion furnace, 12"
Part number: DJ-1206VN -DF
Process: SI3N4
Main controller: KDSC
Power supply: 120 V, 1 Phase / 480 V, 3 Phase
2008 vintage.
KOKUSAI CX-5000 is a diffusion furnace and accessory equipment used for precise thermal control of various Substrates. CX-5000 works by driving a high-precision heater, a gas injection source, and a cooling fan to consistently create an optimal thermal environment to encourage the diffusion of elements within a substrate. KOKUSAI CX-5000 is constructed using a lead-block and ceramic fiber-heated hot zone. The upgraded dual-end heating system on CX-5000 is capable of achieving temperatures of up to 1300 degrees Celsius while maintaining temperature uniformity of ± 5 degrees Celsius. KOKUSAI CX-5000 is designed to handle large substrates up to 400mm in size, as well as small substrates down to 25mm in size. CX-5000 offers an automated mechanism cooling unit to accurately control cooling speeds for maximum product yield. For gas-injection diffusion applications, KOKUSAI CX-5000 features the advanced TotalFlow II automated gas injection machine. With TotalFlow II, users can adjust the gas concentration from the front panel of the machine. Additionally, the TotalFlow II tool allows for precise control of flow rates- from 0.001Slm to 0.0005Slm. CX-5000 also offers a highly intelligent multi-channel PID temperature control asset, ensuring optimal and even heat distribution throughout the hot zone. KOKUSAI CX-5000 is designed with safety in mind, thanks to its comprehensive model of sensors and features, including a 'Gas Leak Sensor', a 'Safety Alarm', and an 'Over Temperature Alarm'. In addition, users can be assured of a safe and secure usage of CX-5000 thanks to its feature-rich programmable user information security equipment. Overall, KOKUSAI CX-5000 is an ideal choice for demanding samples and state-of-the-art R&D applications. With its outstanding precision and performance, CX-5000 provides an unbeatable reliability in production, and is perfect for all diffusion applications.
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