Used KOKUSAI CX-5000 #293763015 for sale
URL successfully copied!
ID: 293763015
Wafer Size: 12"
Vintage: 2010
Diffusion furnace, 12"
Part number: DJ-1206VN -DF
Process: SI3N4
Main controller: KDSC
Power supply: 120 V, Single phase / 480 V, 3 Phase
2010 vintage.
KOKUSAI CX-5000 is a state-of-the-art diffusion furnace and its associated accessories developed by KOKUSAI Semiconductor Equipment Corporation. This innovative platform offers advanced capabilities for the precise and efficient diffusion processes required in semiconductor fabrication. CX-5000 is designed to meet the demanding needs of the semiconductor industry by providing a high level of performance, reliability, and flexibility. At the core of KOKUSAI CX-5000 equipment is the diffusion furnace itself, which is a key component for the thermal processing of silicon wafers. This furnace is designed to provide precise temperature control, uniform heat distribution, and controlled gas flow to achieve optimal diffusion results. The furnace chamber is made of high-quality materials that can withstand high temperatures and corrosive gases, ensuring long-term durability and reliability. CX-5000 furnace features advanced heating elements that enable rapid heating and cooling cycles, allowing for efficient processing of wafers. The system is equipped with multiple heating zones that can be independently controlled to create customized thermal profiles for different process requirements. This level of control enables precise tuning of the diffusion process parameters to achieve the desired dopant profile and junction depth in the semiconductor device. The furnace chamber is designed to accommodate various wafer sizes, ranging from small diameter wafers used in research and development to larger wafers commonly used in production environments. This flexibility allows semiconductor manufacturers to process different types of wafers on the same platform, reducing the need for multiple processing tools and streamlining production processes. In addition to the furnace chamber, KOKUSAI CX-5000 unit includes a range of accessories and peripherals that enhance its capabilities and functionality. These accessories may include gas delivery systems, vacuum pumps, wafer handling robots, and process monitoring tools. The gas delivery machine ensures accurate and controlled delivery of dopant gases into the furnace chamber, while the vacuum pump maintains the required vacuum level for the diffusion process. The wafer handling robot automates the loading and unloading of wafers into the furnace chamber, reducing the risk of contamination and improving overall process efficiency. The robot is equipped with advanced sensors and control systems to ensure precise positioning and alignment of wafers during processing. Process monitoring tools, such as temperature sensors, gas flow meters, and pressure gauges, provide real-time data on the process parameters to enable continuous monitoring and adjustment of the diffusion process. This data-driven approach ensures consistent and reproducible results, leading to higher product yields and improved quality control. Overall, CX-5000 diffusion furnace and its associated accessories offer semiconductor manufacturers a reliable and high-performance solution for their thermal processing needs. The tool's advanced features, precise control capabilities, and flexibility make it a valuable tool for achieving optimal diffusion results in semiconductor fabrication processes. With KOKUSAI CX-5000, semiconductor manufacturers can expect improved process efficiency, reduced operating costs, and enhanced product quality, ultimately leading to a competitive edge in the rapidly evolving semiconductor industry.
There are no reviews yet