Used KOKUSAI CX-5000 #293763032 for sale
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ID: 293763032
Wafer Size: 12"
Vintage: 2015
Diffusion furnace, 12"
Part number: DJ-1236VN -DF
Process: ALD
Power supply: 120 V, Single phase / 480 V, 3 Phase
2015 vintage.
KOKUSAI CX-5000 is an advanced diffusion furnace designed for high-volume manufacturing processes in the semiconductor industry. This cutting-edge equipment offers precise control over thermal processing conditions to achieve uniform and reliable results, making it highly suitable for large-scale production facilities. CX-5000 diffusion furnace is equipped with multiple heating zones and gas injection ports, allowing for precise temperature control and gas flow management during the diffusion process. This enables the furnace to accommodate a wide range of thermal processing requirements, including oxidation, diffusion, and annealing processes, among others. One of the key features of KOKUSAI CX-5000 is its robust construction and advanced thermal management equipment. The furnace chamber is made of high-purity quartz material, ensuring excellent thermal stability and uniformity during operation. The temperature control system consists of multiple thermocouples and PID controllers, enabling real-time monitoring and adjustment of the process parameters for optimal performance. In addition to its advanced heating and temperature control capabilities, CX-5000 diffusion furnace is also equipped with a sophisticated gas delivery unit. This machine includes mass flow controllers for precise regulation of gas flow rates and concentrations, as well as gas purifiers to ensure the purity of the process gases. The integration of these components allows for highly precise and repeatable diffusion processes, resulting in high-quality semiconductor devices. Furthermore, KOKUSAI CX-5000 is designed with user-friendly features for ease of operation and maintenance. The furnace is equipped with a intuitive graphical user interface (GUI) that allows operators to easily program and monitor the process parameters. Automated sequences and recipe management functions are also available, enabling users to efficiently execute complex processing routines with minimal manual intervention. CX-5000 diffusion furnace is compatible with a wide range of wafer sizes, from small substrates to large 300mm wafers, making it a versatile solution for various semiconductor manufacturing applications. The furnace can accommodate single wafer processing as well as batch processing modes, providing flexibility to meet different production requirements. Overall, KOKUSAI CX-5000 diffusion furnace is a state-of-the-art equipment that offers exceptional performance and reliability for high-volume semiconductor manufacturing. Its advanced features, precise control capabilities, and user-friendly design make it a valuable asset for semiconductor companies looking to achieve consistent and high-quality processing results in a production environment.
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