Used KOKUSAI DD-813V #293622158 for sale

KOKUSAI DD-813V is a diffusion furnace and accessory equipment commonly used in semiconductor lithography applications. It features automatic temperature control, and offers a decentralized plate-oriented design with a variety of plate sizes and heating rates available. The system is built for high temperature use, with a temperature range of 0 to 1050°C, and can reach operating temperature in less than 20 minutes. The power level can be adjusted from 0 to 150 kW, enabling hard, medium and soft annealing of wafers and other related materials. DD-813V's decentralized design is modular, enabling easy access to all parts of the unit, and using a common cooling machine as opposed to multiple cooling tanks. Each plate section features quartz holders, with a standard 10mm graphite plate and 0.6-1mm quartz plate stand included, and 2mm and 3mm quartz spacer plates available as an optional add-on. The machine is designed for efficient operation and minimal downtime, with all mechanical, electronic and optical components optimized for optimum performance. The entire tool is housed in a compact, purpose-built machine enclosure, which is designed to maximize uptime and maintain an optimal working environment. The electronic control asset and fluid non-contact cooling generator are both remotely operated to ensure ease of use and maintenance. All equipment is designed for both wet-processing and dry-processing capabilities, with a wide range of process recipes and controls available for use. In addition, an integrated gas manifold is included to allow for external gas delivery. KOKUSAI DD-813V model utilizes Auto-regen (AR) technology, which reduces maintenance costs by automatically regenerating and purging the quartz plates while in operation. Horizontal and vertical position sensors ensure uniform exposure over the entire plate area, while built-in safety features provide an additional layer of protection. The equipment is also rated for explosive atmospheres, and tested to meet Rohs standards. Overall, DD-813V Diffusion Furnace and accessories system is a versatile and high quality machine, enabling users to effectively and efficiently process a wide range of materials. Its hardened quartz plates, military grade components, and easy-to-use interface offer a great deal of flexibility, maximizing production output, and supporting a range of industrial and commercial semiconductor fabrication and lithography applications.