Used KOKUSAI DD-813V #293622162 for sale

ID: 293622162
Vintage: 1994
Furnace 1994 vintage.
KOKUSAI DD-813V is a diffusion furnace, a specialized process equipment designed for Doping, Annealing, and Activation of Silicon wafers. DD-813V features the latest innovative technology, providing excellent quality and performance for thermally processing quartz and silicon wafers. It can heat up to 1000°C with quartz or up to 1350°C with an optional graphite chamber. Also, KOKUSAI DD-813V can conveniently fit in two 650mmx4 inch wafers as well as one 8-inch wafer. Its digital control panel and touchscreen control system make it easy to adjust temperatures, monitor times, and access different programs. The machine is equipped with high performance helium or nitrogen gas flow, utilizing high velocity gas diffusion to spread the gas evenly over the target. This ensures uniformity and consistency in the high purity glass etching process. Inside of DD-813V is equipped with a multi-level surface heater which helps in temperature setting and temperature uniformity. This is combined with four Pyrolytic Boron Nitride (PBN) insulated cylinders, which evenly spread heat to the sample. It also helps in setting high levels of temperature while ensuring accuracy of processing. To ensure safety in operation, KOKUSAI DD-813V is equipped with a cool box gas heater protection system. This is designed to prevent any build-up of heat, which can cause sample damage. DD-813V also features a high performance oxidation sensor, which helps in monitoring the thin oxide layer on the wafer. KOKUSAI DD-813V is a convenient and multi-functional diffusion furnace, offering excellent accuracy and precision. It is designed for safe, fast, and economical thermal processing of quartz and silicon wafers, making it ideal for semiconductor fabrication. Therefore, DD-813V is the ideal choice for thermal processing of semiconductor materials.
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