Used KOKUSAI DD-823V-8BL #9188430 for sale
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ID: 9188430
Wafer Size: 8"
Vintage: 1997
Pyro diffusion furnace, 8"
SMIF
1997 vintage.
KOKUSAI DD-823V-8BL Diffusion Furnace is a high-performance equipment used for simultaneous doping and annealing processes in the fabrication of microelectronic devices. It features a 650°C maximum temperature setting, and an 8-inch quartz tube furnace chamber designed for the diffusion of various materials including Silicon, Germanium, Aluminum, Boron, Gallium, and Indium. The furnace is also equipped with a built-in quartz boat for the transfer of substrates into the chamber, and it has an additional component shelf to facilitate the diffusion of multiple substrates in parallel. It is also capable of processing samples up to 8" in diameter and 1/8" thick. DD-823V-8BL furnace uses an all-digital design with a direct-flow SL-2000V series temperature controller to achieve precise temperature control and uniform temperature distribution. The digital controller utilizes a series of thermocouple junction boxes to measure and monitor temperatures. For additional uniformity, a recirculation fan is included to enable convective heat transfer. The furnace also features standard safety features such as an overtemperature limit control, an emergency shutoff switch, and a safety light. This diffusion furnace comes with an integrated vacuum system comprised of a three-stage rotary vane vacuum pump to enable high-vacuum operation and quick reduction of the chamber atmosphere. The system features a high efficiency particle filter with an easy-to-clean design. In addition, the furnace is equipped with a diffusing shield, diffusion crucible, backing plate, and mesh to facilitate the diffusion of materials into the chamber interior. KOKUSAI DD-823V-8BL uses non-contact IR optical sensors to ensure accurate sample temperature profiling and compatibility with all standard accessories. Intuitive and user-friendly design controls are also featured, making operation and maintenance easy. The furnace is is designed with a single magnetic latch near the top of the chamber for easy cleaning and accessibility. Overall, DD-823V-8BL Diffusion Furnace is a high-precision and advanced instrument with robust features for reliable doping and annealing processes in the production of microelectronic devices.
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