Used KOKUSAI DD-823V #9286970 for sale
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ID: 9286970
Wafer Size: 8"
Vintage: 1994
System, 8"
Gas supply:
PCW Supply
Boat system
Load lock
(26) Carrier slots
System control:
Main controller: 0 x 3000
Touch screen
Front and rear gas flow
Temperature: CQ1600
Pressure: PCU 3000
Power supply: 1Φ 208V / 15A
Heater power: 3Φ 208V / 250A
Pump unit
Process gases:
Gas 1:
FC-986Y-BF N2 10 SLM
FC-986Y-BF N2 10 SLM
FC-985Y-BF N2 2 SLM
Gas 2:
FC-985CY-BF NO 1 SLM
Gas 3:
FC-986CY-BF N2O 20 SLM
Gas 4:
TC-FC986CY-BF O2 10 SLM
TC-FC985CY-BF O2 1 SLM
Gas 5:
FC-985CY-BF H2 500 Sccm
FC-985CY-BF H2 200 Sccm
FC-985CY-BF H2 500 Sccm
FC-985CY-BF H2 500 Sccm
FC-985CY-BF H2 200 Sccm
Gas 6:
FC-985CY-BF HCl 500 Sccm
Gas distrubution:
FUJIKIN Standard
SUS-316L Tubing material
VCR Tubing finish
FUJIKIN Manual
FUJIKIN Air operated valve
VERIFLD Regulator
AERA MFC
Exhaust distribution:
Baratron gauge
Main valve
Pump line
(24) Cassettes
(2) Input / output ports
(5) Wafer transfers
Ceramic fork material
(5) Forks
Fork variable pitch
Elevator:
Boat elevator
Auto shutter
Boat rotation
Mechanical part
Heating chamber:
TC R Type: (5) Zones
(5) Spikes T/C
(5) Overtemp protectsT/C
Door interlock
Exhaust:
Heater
Gas box
Process
Missing parts:
CKD
Therno VAC TM 22
1994 vintage.
KOKUSAI DD-823V is a diffusion furnace and accessory that is suitable for a broad range of applications in the semiconductor industry. The furnace has a chamber that is capable of reaching and maintaining temperatures up to 1300℃. This enables the diffusion of gases and various materials for processing and other applications. The furnace is also designed to effectively and efficiently maintain an atmosphere suitable to the application being performed inside the chamber. DD-823V is equipped with multiple control systems. It has a macro-programmer for controlling the temperature, gas flow and other processes inside the chamber. Additionally, the furnace is also equipped with precision temperature controllers for maintaining accurate and repeatable temperature profiles. These controllers also provide adjustable parameters for controlling the rate of rise and fall of the temperature inside the furnace as per the application requirement. The furnace's power section uses advanced power factor correction technology, allowing for precise control of the power delivered to the chamber, further enhancing the processing accuracy. In addition to its temperature control and process control features, KOKUSAI DD-823V also features various safety components. These include over-temperature and oxidation alarms, as well as an exhaust fan that prevents gas lingering inside the chamber. The furnace also features a safety door with an emergency stop button that shuts off all the chambers power in the event of an emergency. All of these components ensure that the furnace is safe and reliable for use in a wide range of applications. DD-823V also comes with a complete set of accessories that make it easy to use and maintain. These include a temperature indicator, hygrometer and pressure gauge for monitoring the atmosphere inside the chamber. The unit also includes various valve control systems and a quartz tube, allowing users to preview the diffusion process. Finally, a wide range of adapters and other accessories are available to connect the furnace to external systems. KOKUSAI DD-823V is a reliable, safe and efficient diffusion furnace and accessory that is suitable for various processing applications in the semiconductor industry. Its ability to reach and maintain temperatures up to 1300℃, combined with its numerous safety features and accessories, make it an ideal choice for many processing requirements.
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