Used KOKUSAI DD-853V #9133268 for sale
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ID: 9133268
Vintage: 1997
Vertical diffusion furnace,
Process gas: N2,H2
Temp controller: CQ1600
IO port type: 26 slot flat zone
1997 vintage.
KOKUSAI DD-853V is a prestigious diffusion furnace and accessory designed for the most exacting applications. This unit is designed for use in the semiconductor industry when controlling high temperatures are required during diffusion or deposition processes. It is capable of handling temperatures up to 1300°C (2372°F) and has excellent thermal uniformity with the ability to maintain process temperatures up to ±3°C (5°F). It is available in two sizes, the larger model measuring 28 inches in length (710 mm) with a 6 inch (150 mm) ID and the smaller model measuring 21 inches in length (530 mm) with a 4 inch (100 mm) ID. KOKUSAI DD 853V offers a wealth of features for efficiency and reliability. It has a high quality quartz tube with an ultra pure quartz liner that avoids contamination while providing durability and airtight integrity. The advanced power supply provides a wide range of voltage and current settings for precise control of the heat for consistent results. The controller offers quick access to the power setting as well as access to timing, process modes, and the storage of up to nine recipes. DD-853V is equipped with a generous array of safety features. This includes both overtemperature protection and interlock functions to prevent dangerous conditions from occurring. The interior of the furnace is easy to clean and maintain with a heating zone that can be retracted for access to the quartz tube. A ruggedized shell helps protect the electronic components from damage, and an oxygen-free heating space helps prevent oxidation in the diffusion chamber. DD 853V is an outstanding diffusion furnace and accessory for use in semiconductor processing applications. With its ability to handle high temperatures and maintain excellent thermal uniformity, it provides superb quality and dependable performance. Its wide range of voltage and current settings provide precise control of the heating process, while its comprehensive safety features ensure efficient and reliable operation. Any facility used in semiconductor production can benefit from KOKUSAI DD-853V diffusion furnace.
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