Used KOKUSAI DJ-813 #141295 for sale

KOKUSAI DJ-813 is a diffusion furnace and accessories designed for wafer processing applications, including metal deposition and dielectric etching. This furnace is capable of multiple process combinations, with heated and non-heated wafer handling, a horizontal hot wall-style capability, and up to two process sequences. DJ-813 is equipped with a 13-inch quartz tube for diffusion heating and cooling. This tube is designed to achieve temperature uniformity with minimal variation. The frame, temperature zone and power zone structure also help keep the temperature uniform, making it ideal for low temperature processing. The adjacent wafer handler is adjustable and capable of holding up to four wafers at a time. KOKUSAI DJ-813 can be used for both metal deposition and dielectric etching. The controller software is designed to optimize process conditions throughout the sequence. High accuracy temperature control is achieved with the included analog or digital PID controller. The power supply has multiple outputs and features a high Frequency IGBT generator, allowing it to reach higher process temperatures with low background noise. The furnace also includes a programmable timer, gate mixer, and multiple wafer lids. The lids provide a gas-tight seal for process chemicals, preventing cross contamination. The gate mixer allows for precise chemical mixing, reducing risk of contamination. The timer can be programmed for multiple auto-start and auto-stop operations, reducing the need for manual intervention. Overall, DJ-813 is a high-performance diffusion furnace and accessories suite, capable of low temperature processing and multiple process combinations. It is an ideal solution for wafer processing applications, offering fast and precise temperature control, uniformity and wafer handling.