Used KOKUSAI DJ-813V #293652777 for sale

KOKUSAI DJ-813V is a diffusion furnace and accessories specifically designed to fulfill the most advanced technological needs of the semiconductor, photovoltaic solar cell, and other industries. This single-wafer, low temperature process delivers up to three times the growth rate over traditional systems, with a quality that equals that of the industry leader. The furnace is equipped with advanced process control, enabling precise and repeatable results. It offers modular design, giving users the flexibility to file their own recipes up to 4 stages of up to 4 zones. DJ-813V features a quartz tube which is heated by two self-regulating furnace elements installed in an air-cooled chuck, enabling a fast and uniform heating process up to 1350°C. It is capable of precisely controlling the diffusion temperature, resulting in an exquisitely accurate temperature profile. A gas distribution equipment allows uniform gas flow and even distribution of reactants. To keep the furnace clean and efficient, a graphite boat, capable of transporting multiple 4" wafers, can be manually loaded and unloaded. There is also an optional proximity sensor installed to the quartz tube door to help preventing the wafer from being too close to the high temperature. The internal chamber is also equipped with an alarm system that, in case of a temperature overrun, will automatically shut down the unit. For added safety, this high-performance diffusion furnace is fitted with a modified, robust quartz tube structure and PID control which minimises chamber-to-chamber temperature variation. Last but not least, KOKUSAI DJ-813V is equipped with a variety of interfaces and communication ports, such as EtherNet/IP, ModBus and USB, allowing the user to access the systems for remote programming and data recording. The touchscreen controller makes it easy to navigate the machine and enter recipes. With this setup, users can securely access and control their furnace wherever they are, without sacrificing performance.