Used KOKUSAI DJ-853V-8BL #9309570 for sale
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ID: 9309570
Wafer Size: 8"
Vintage: 2004
Furnace, 8"
High Temperature Oxide (HTO)
2004 vintage.
KOKUSAI DJ-853V-8BL is a diffusion furnace and accessory designed for use in semiconductor manufacturing processes. It features an anodized aluminum vacuum chamber and robust design for high-temperature and high-vacuum applications. This enables optimal diffusion of small molecules from the source material into the substrate, thus creating a homogenous coating. It provides a maximum working temperature of up to 1600°C and has a chamber wall thickness of 200 mm. KOKUSAI DJ853V-8BL is sealed with a resistance welded, water-cooled steel frame and utilizes an electromagnetic shutter control equipment. This allows for precise adjustment of chamber temperature and excellent temperature uniformity. It also features a multi-stage vacuum system with rotary vane pumps and infrared absorption gas analyzer in order to provide an efficient evacuation process. In order to improve operator safety, DJ-853V-8BL is equipped with an alarm unit that will shuts down the machine in case of an abnormal temperature change. Additionally, it also features a hardened mineral glass window that allows for visual observation of the diffusion process without compromising vacuum integrity. DJ853V-8BL can be supervised and controlled by a user-friendly touch panel display. It is capable of storing up to 500 process recipes and offers users the ability to control heat and thermal diffusion on the screen. It allows users to precisely control the gas atmosphere inside the chamber, supporting up to four gases with a maximum pressure of 0.2 atm. KOKUSAI DJ-853V-8BL offers a wide variety of diffusion and thermal processes and is specifically designed to meet different diffusion and thermal requirements. It is ideal for applications such as dopant insertion, heat treatment, rapid thermal processing, and rapid annealing. It is also suitable for use in the fabrication of semiconductor devices, flat panel display substrates, laser diodes, magnetic sensors, and other associated components.
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