Used KOKUSAI DJ-853V #293648859 for sale
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ID: 293648859
Wafer Size: 8"
Vintage: 2022
Diffusion system, 8"
Controller
Quartz (Inner and outter back)
Insulation material box
Purge nozzle
2022 vintage.
KOKUSAI DJ-853V is a diffusion furnace and accessory equipment designed to provide an accurate and efficient means of fabricating semiconductor components. The system is composed of a main unit, a power supply cable, and a control unit with touch-screen display. KOKUSAI DJ 853V has a chamber of 8" diameter and can process wafers up to 5". The chamber is constructed of a high purity quartz tube and is sealed with a special gas-tight seal. This ensures effective temperature uniformity and a fast response time. The unit is capable of controlling temperatures up to 1250°C with a maximum heating rate of 500°C/minute. The machine also features a two-zone temperature control tool with independent temperature control from top to bottom. The asset also features a variety of process options designed to facilitate efficient and accurate fabrication of semiconductor components. These include a two-stage sulization process, an in-situ heating annealing process, and a low-pressure rapid thermal annealing (RTA) process. The sulization process includes a layer separating process and a differental diffusion process. The in-situ heating annealing process reduces the thermal budget of the component. The low-pressure RTA process can be used to minimize the thermal diffusion of silicon during processing. DJ-853V also includes a variety of safety features. These include an Over Temperature Protection (OTP) model, a programmable safety controller, and an emergency stop button. The OTP equipment monitors the system temperature range to ensure safe operation. The programmable safety controller monitors the unit's operational parameters, while the emergency stop button allows the user to quickly shut off the machine in case of an emergency. DJ 853V also features a compact and efficient design, allowing for a smaller footprint in the lab. The tool also features a wide range of customizable features, allowing the user to tailor the asset to their specific fabrication needs. The model is also compatible with a variety of accessories, making it an ideal solution for both academic and industrial environments.
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