Used KOKUSAI DJ-853V #9048140 for sale
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ID: 9048140
SiON LPCVD furnaces
Configured with DCS/NH3/N2O
High temp transformer, 1200°C.
KOKUSAI DJ-853V is a cutting-edge diffusion furnace and accessories, designed for high-precision applications requiring consistent and accurate processing results. This advanced furnace is ideal for applications in microelectronic and optoelectronic industries, where precise control over the processing parameters is needed. KOKUSAI DJ 853V is equipped with a radiant-type halogen lamp as its heat source that emits a spectrum of light centered on wavelength of 530 nm. The near-perfect spectrum emitted by the lamp enables the furnace to produce accurate results without needing to compensate for the inherent shifts that affect lamp temperatures and spectral distributions. In addition, this diffusion furnace uses a reflector that concentrates the emitted light onto the substrate in order to ensure high-precision processes. This reflects light allows the substrate to receive the exact amount of optical energy to contribute to a precise result with minimal profile degradation. To ensure precise temperature control, DJ-853V is also equipped with a top-of-the-line temperature control system. This system uses thermocouples and PID (Proportional Integral Derivative Controller) in order to regulate the temperature. The thermocouples measure the temperature of the substrate while the PID controller is used to adjust the temperature of the halogen lamp. Furthermore, this diffusion furnace is equipped with an advanced timer that controls all the process parameters. It enables accurate and reliable timetables and also allows for continuous process. This timer is also capable of memorizing the last used parameters, allowing the user to easily restore a processing job that was carried out previously. To guarantee a safe and high-quality process, DJ 853V is equipped with an Ozone Generation Protection System that prevents the formation of ozone which can adversely affect the substrate. Finally, KOKUSAI DJ-853V can be installed into an exhaust chamber for easy integration. It also has an intuitive control panel with user-friendly operation displays. All in all, KOKUSAI DJ 853V is a powerful diffusion furnace and accessories, capable of providing precision results at a very high level. It utilizes advanced technologies to ensure consistent and accurate process parameters, enabling users to carry out precise processes with ease and confidence.
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