Used KOKUSAI DJ-853V #9206222 for sale

KOKUSAI DJ-853V
ID: 9206222
Wafer Size: 6"
Vintage: 1996
LPCVD Systems, 6" 1996 vintage.
KOKUSAI DJ-853V diffusion furnace is an advanced tool designed for the purpose of providing precise temperature control while performing a variety of semiconductor fabrication processes. The furnace utilises vertical and horizontal heating elements, as well as active flow control, to provide an evenly distributed temperature throughout the work chamber. The robust vacuum seal on the vessel ensures high quality operation and cleanroom emission control compliance. KOKUSAI DJ 853V diffusion furnace has a standard temperature range of 200°C to 1300°C and optional temperatures higher for specialised processes. An intuitive temperature focusing system allows for rapid temperature adjustment across multiple points, perfect for rapidly changing alloying temperatures. The active flow control design allows for precision temperature management, especially important for a variety of diffusion processes. DJ-853V also features a built-in amperage regulator, giving the user control over a wide range of annealing currents for precisely controlled current curves. With up to four quartz tube connections, up to three annealing zones and two independent gas control valves, DJ 853V can handle a multi-step annealing process with ease. KOKUSAI DJ-853V is outfitted with an advanced PID control monitor which displays the present temperature with a highly sensitive resolution of 0.1°C, while tracking time and current values. It also features a storage capacity of up to 500 recipes, as well as a USB connection and optional Ethernet ports for easy data transfer. With a high quality quartz tube built to last, and a host of safety features such as pressure switches, air cooling systems and over-temperature protection, KOKUSAI DJ 853V is an excellent diffusion furnace for the modern semiconductor fabrication facility.
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