Used KOKUSAI / HIKE Vertex DD-803V #293592871 for sale

KOKUSAI / HIKE Vertex DD-803V is an industrial grade diffusion furnace and associated accessories. Specifically designed for use by the semiconductor industry, the DD-803V is used for the formation of epitaxial layers and thermal oxidation of wafers during device fabrication. It is well suited for rapid thermal annealing and rapid cooling. The DD-803V is designed for process reproducibility and reliability, with a maximum operating temperature of 1,400°C and a rapid-cooling rate of -5°C to +150°C per second. The integrated diffusion heating element utilizes a boron nitride (BN) cement-based ceramic jacket with a tungsten heating element. This combination provides excellent thermal uniformity, fast heating and cooling rates, and improved wafer process uniformity. The furnace is constructed of stainless-steel materials, with an insulation equipment to provide maximum temperature stability. The vacuum chamber is constructed of 316/304 grade stainless-steel, with an optional pyrolytic boron nitride (PBN) liner for reduced particulate contamination. The DD-803V comes equipped with a process control computer and a human-machine interface (HMI) to manage and monitor the process. This state-of-the-art system features monitoring of chamber temperature and pressure, as well as en station process unit data. The HMI includes an array of protective interlocks against operator errors, abnormal operating condition and high furnace temperatures. The DD-803V also includes a variety of ancillary items such as an exhaust machine, handle load box, process load cassettes, quartz boats and pre-ample process equipment. The entire tool is designed for ease-of-use and maintenance. Overall, HIKE Vertex DD-803V asset allows for the accurate and repeatable process of device fabrication. With an interchangeable model architecture and advanced process control, the DD-803V is ideal for the advanced manufacturing of semiconductor devices.