Used KOKUSAI Quixace II #9027427 for sale
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ID: 9027427
Wafer Size: 12"
Vertical furnace, 12"
Single tube
Product load size: 125
Rapid Heating / Cooling (RHC)
Boat rotation
SEMI S2-0200E compliance
Main and sub (rear) operation controllers
Main controller: CX5000
SEMI EDA capability
Dual boat 125 WLS
Integrated Gas System (IGS) type: Fujikin 1.125"
RHC1 upgrade
Quartzware (1st set)
Rear operation panel
(2) Hard gas pattern panels
HPM (toxic gas) interlock
POD ID reader (AdvanTag GATEWAY HSMS)
OHT capability
Exhaust APC
Boat rotation type: N2 purged rotation
Self gas cleaning
EEMS CX-9800 server capacity and license
Options:
Canister (BK1200) for TiCl4
Bubbler (VG600W).
KOKUSAI Quixace II is a high-tech diffusion furnace and accessory designed to provide precise and accurate control over the furnace temperature parameters. This heavy-duty production equipment is suitable for a wide range of industrial processes, including oxide, nitride, and carbon-substrate diffusion processes. The robust construction is composed of a robust steel frame with a wide operating temperature range of up to 1200°C (2192°F). An advanced PID temperature controller features a self-regulating adjustment system, which ensures precise heat source movement and temperature maintenance. KOKUSAI QUIXACE-II also offers consistent temperature consistency with timestep control and real-time temperature monitoring, allowing for a greater product yield and precision. In combination with an optional quartz counter, the furnace can function in both heating or cooling modes, enabling a faster thermal cycle. The furnace is powered by mains power and is equipped with an emergency stop feature for user safety. The unit is equipped with a two-stage magnetic safety switch mechanism, a pressure switch for pressure control, a cooling fan for maintaining lower temperature, and a flame-proof door for safe homogenous heat treatment. This sophisticated production unit features several automated functions for convenience. The large internal capacity offers increased productivity, and an ergonomic work surface makes it easy to manage the diffusion process. Quixace II supports a variety of materials for precisely controlled temperatures and features a self-monitoring machine with high safety standards. The advanced pressure control tool can help save energy, while also reducing costs. The asset is designed for maximum safety and maximum efficiency, making it an ideal choice for industrial grade diffusion furnace.
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