used KOKUSAI QUIXACE II for sale

This KOKUSAI QUIXACE II has been sold.

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ID#: 9027427 Manufacturer: KOKUSAI Model: QUIXACE II Category: DIFFUSION FURNACES & ACCESSORIES Wafer Size: 12" Equipment Details: Vertical furnace, 12"
Single tube
Product load size: 125
Rapid Heating / Cooling (RHC)
Boat rotation
SEMI S2-0200E compliance
Main and sub (rear) operation controllers

Main controller: CX5000
SEMI EDA capability
Dual boat 125 WLS
Integrated Gas System (IGS) type: Fujikin 1.125"
RHC1 upgrade
Quartzware (1st set)
Rear operation panel
(2) Hard gas pattern panels
HPM (toxic gas) interlock
POD ID reader (AdvanTag GATEWAY HSMS)
OHT capability
Exhaust APC
Boat rotation type: N2 purged rotation
Self gas cleaning
EEMS CX-9800 server capacity and license

Canister (BK1200) for TiCl4
Bubbler (VG600W).
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