Used KOKUSAI Quixace II #9382771 for sale
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ID: 9382771
Wafer Size: 12"
Vintage: 2014
Vertical LPCVD furnace, 12"
Model name: DJ-1236-DF
Process: ALD SiO2
(2) Robotic FOUP loading stations
Precursors / Reagents / Catalyst: Pyridine, HCD, Water
Purge gas: Nitrogen
Cleaning gas: Nitrogen Tri-fluoride
DC Power supply: 24 VDC, ±15 VDC
(7) Boxes
Power box
Gas box
Source/Bubbler box
Bonnet
Heater
Refill stations
Tweezers
EDA Box and cover
Front end exhaust damper cover
Bridge includes SSR
Power cables included
Boat plates and screws
Heater upper doors
Water dead man panel
Manual
L/A Exhaust and elbow
Handy terminal
(5) Foreline cages
Gas box elbow
Foreline clamp box
Cable duct [L/A crossover]
Loose gas line and flex lines
RHC Exhaust duct and panels
BG Lines
RHC Metal flex duct
RHC Metal duct cover
Connecting duct
Tube flange
Exhaust pipe
Exhaust union
Injector heaters
RHC Damper packing
RHC Damper block
RHC Adiabatic blocks
Injector stand offs
TC Stand off
Flange clamp insulators
Heater insulators
(2) Fore line clamps
(2) Teflon cushions
Tweezers
Fore line clamp bolt
Teflon tube pins
Joint plate assembly
Axis fixing jig
Front body support jig
Utility support jig
Buffer rack support jig
Power sub-systems:
Vacuum gauges
Sensors
Compressed air valves
PLC I/O (Analog and digital)
Device net
Ethernet and MFC’s
Does not include:
Pump
Scrubber
Capacitance manometer
Precursor bottles or connecting lines
Missing parts:
QUARTZ Boat
Reactor
Adiabatic plate
Mounting nuts and bolts
Power supply:
480 VAC, 60 Hz, 300 A, 3 Phase
120 VAC, 60 Hz, 30 FA, Single phase
2014 vintage.
KOKUSAI Quixace II is an innovative , high-performance diffusion furnace and equipment developed as a cost-effective and reliable solution for professional grade material processing. Built with a powerful and efficient motor, this high quality furnace ensures quick and efficient heat processing of a wide array of materials. The stainless-steel construction and ceramic insulation system minimizes heat loss while maintaining temperature accuracy, allowing even heating of substrate materials. The furnace comes complete with a digital PLC and a touch-friendly HMI, allowing for user-friendly operation and precise temperature control. The intuitive and powerful control unit allows for custom temperature programming for different materials, while also enabling quick adjustments and accurate monitoring of settings. Additionally, the furnace is equipped with a real-time fault protection machine, alerting the operator when abnormal temperatures or conditions are detected. The included cooling tool is also highly efficient, working with a built-in low and high temperature levels, designed to protect the material being processed from damage due to excessive temperatures. The specially designed open air structure also heavily reduces dew point-related corrosion of the internal components of the furnace. In addition, KOKUSAI QUIXACE-II offers a wide range of accessories which can easily be attached and removed, allowing for further customization of the asset. The chamber is constructed with clear observation windows, with quartz glass models available for highest temperature applications. A variety of insulation configurations are available to suit different operations, including low thermal mass, high thermal mass, and high alumina fiber options. Other accessories, like four-point probe harness, water-level sensing, and cold-water purification unit are also available. In sum, Quixace II is an ideal choice for professionals looking for high-performance, reliable and economical diffusion furnace solution. Its efficient power source, intuitive control model, superior cooling capability and range of accessories make it an ideal choice for those seeking maximum efficiency and reliability in processing materials.
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