Used KOKUSAI Vertron DJ-803V #9233086 for sale
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ID: 9233086
Wafer Size: 8"
Vertical diffusion furnaces, 8"
Process: Si2N4 / Nitride
Reserved batch operation
Number of wafer / Batch: 100
Wafer shape: Semi notch
Wafer cassette: 8" Plastic
Gas box
Gas sticks:
N2
SiH2Cl2
NH3
Gas flow diagram
Heater:
(4) Heater zones
Maximum temperature: 850°C
Profile TC control thermocouple
Control thermocouple location: Between outer tube and inner tube
Boat rotation
Piezo pressure control
VG for control
Type, range: Baratron
VG for interlock
Type, range: Baratron
No SMIF Interface
No pump
No scrubber
No loadlock.
KOKUSAI Vertron DJ-803V is a diffusion furnace specifically designed to perform diffusion processes. It provides an easy-to-use platform for processing substrates at a range of temperatures under controlled atmospheres. It is widely used in the semiconductor and electronics industries. Vertron DJ-803V is equipped with an innovative water-cooled susceptor and stationary showerhead, enabling simultaneous processing of multiple substrates and quicker processing. This type of furnace is best suited for producing diffusion layers with a continuous uniform thickness. The large size of the furnace also allows a greater cooling rate during the cooling process, ensuring the highest yield of substrates. The Vertron furnace is ideal for annealing metals, diffusion of substrates, diffusing coating materials and for various multi-step processes. It offers wide range of operating temperatures, ranging from 20°C to 1300°C. It is also equipped with an advanced vacuum equipment, capable of maintaining a clean vacuum environment inside the chamber. To ensure efficient operation, KOKUSAI Vertron DJ-803V is fitted with a powerful high-frequency air source, a highly-reliable quartz glass heater, and a balanced pressure system. The furnace has an automatic temperature control unit, which ensures accurate temperature control during the entire process. The heater power range is between 1.5 and 15kW, providing precise power-setting control. Vertron DJ-803V furnace also has a two-level independent control machine. The first level includes an intuitive LCD display and a built-in recipe memory that facilitates easy operation. The second level consists of a PC connection and software, allowing for further installation and programming purposes. KOKUSAI Vertron DJ-803V is a powerful and efficient tool for performing a wide variety of diffusion processes. Its innovative features ensure that every process runs smoothly and provides excellent product yield. Its ease of use and high-precision processing make it a great choice for industrial diffusion processes.
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