Used MRL 1134 #293811496 for sale

MRL 1134
ID: 293811496
Wafer Size: 6"
System, 6".
MRL 1134 is a high-performance diffusion furnace equipment designed for the precise doping of semiconductor materials in a controlled environment. This advanced furnaces system is equipped with a range of accessories that enhance its capabilities and enable efficient diffusion processes to meet the demands of the semiconductor industry. 1134 diffusion furnace is a horizontal tube furnace that uses a combination of heat and gas flow to uniformly distribute dopant atoms into the surface of the semiconductor substrate. The unit is built with high-quality materials that can withstand high temperatures and corrosive gases, ensuring reliability and longevity in operation. The furnace features multiple heating zones, each independently controlled to provide precise temperature profiles required for different diffusion processes. The furnace tube is typically made of quartz or other high-purity materials to minimize contamination of the semiconductor wafers during the diffusion process. The tube is heated using resistance heating elements that can reach temperatures of up to 1200 degrees Celsius, creating the optimal conditions for dopant diffusion. The tube design allows for easy loading and unloading of semiconductor wafers, making the process efficient and convenient for operators. One of the key features of MRL 1134 diffusion furnace is its gas delivery machine, which provides a controlled atmosphere inside the furnace during the diffusion process. The tool includes mass flow controllers that regulate the flow rates of different dopant gases, such as arsine, phosphine, and diborane, ensuring precise doping levels and uniformity across the wafer surface. The gas delivery asset is integrated with the furnace control model, allowing operators to set and monitor gas flow parameters easily. 1134 diffusion furnace is also equipped with a sophisticated temperature control equipment that utilizes high-precision thermocouples to measure and adjust the temperature inside the furnace accurately. The system can create complex temperature profiles required for advanced doping processes, such as ramping up and down at different rates or maintaining a constant temperature for an extended period. This precise temperature control ensures consistent and reliable diffusion results for semiconductor fabrication. To enhance the performance and capabilities of MRL 1134 diffusion furnace, a range of accessories are available for integration with the unit. These accessories include automated wafer handling systems, rapid thermal annealing modules, and in-situ monitoring tools for real-time process control. These accessories enable operators to streamline the diffusion process, increase throughput, and improve the overall quality of the doped semiconductor wafers. In conclusion, 1134 diffusion furnace is a state-of-the-art machine designed for the precise doping of semiconductor materials in a controlled environment. With its advanced features, high-quality construction, and range of accessories, the furnace offers semiconductor manufacturers a reliable and efficient solution for achieving precise dopant profiles and uniformity in their fabrication processes.
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