Used MRL MDL 1148 #9170550 for sale
URL successfully copied!
Tap to zoom
ID: 9170550
Diffusion furnace
Welded frame construction with antique white painted frame and panels
Front access through swing out bi-fold doors
Element on center lines, 19"
Service access: Tilt down front instrument panels
Internal round electro polished scavenger with individual tube level exhaust
Stainless steel tube: Diameter, 3"
R Spike for temperature control
Redundant excess temperature interlock
Air to water heat exchanger
Fan cooling module on top
Auxiliary power requirements: 120 V Step-down transformer
Furnace control power back-up: UPS
(6) Leveling feet
Heating elements (Tube 2, 3 and 4):
(3) Zones element
Linear thermal flat zone, 48"
Element uniformity:
+/- 1.0°C Below 600°C across linear flat zone
+/- 0.5°C Above 600°C across linear flat zone
Insulation / Energy kits are included per tube level
Load and source end blocks
Soft tube collars
Soft heat disks
Load station:
Welded frame construction with antique white painted frame and access panels
Mirror polished finish on work surface
Pullout drawers in load station base
Horizontal laminar flow with fire retardant, Class I HEPA filters
Variable speed blowers to supply air flow to HEPA filters
Front access laminar flow pre-filters
Channels on back wall allow universal mounting of cantilevers
(6) Leveling feet
Auxiliary power requirements: 110 V Outlets
Gas Plumbing Module (GPM):
Welded frame construction with antique white painted frame and access panels
(4) Stainless steel tube level shelves
Side and front access through clear vented lexan doors
(4) Leveling feet
Gas trays are mounted vertically, facing front
Main breaker and tube breaker with lock out tag out capability located in base
Element MRL MaGnA Maximum operating temperature: 1100°C
Process tube: Quartz process tube
Carriers: Quartz
Baffles: Non-product boats on load
Source end of product wafers
Load baffles: Quartz 3 plate paddle shank
Profile TC: Type R
3-Junction
Source entry
SiC Paddle: 2" Square shank, slotted
Gas tray:
(4) AERA Analog mass flow controllers (MFCs)
Nitrogen (N2), High flow
Nitrogen (N2), Low flow for carrier gas (POCL3)
Oxygen (O2), High flow
Oxygen (O2), Low flow
N2 Loop with fixed orifice
Normally open valve is provided during power fail
Pressure switch with gauge on carrier N2 per bubbler system
Bubbler assembly for POCl3 (Tube level 2, 3 and 4):
JC SCHUMACHER ATCS-15 Source temperature controller
Gas tray to bubbler to process tube: Teflon connections / Valves
Chemical ans flask
MRL Z3 Cantilever belt drive (X 3, tube 2, 3 and 4):
Box beam backbone for overall drive support
Precision linear rail providing smooth ride
(2) Profile linear bearings
Front and rear sprocket with non-particulate ladder chain
360:1 Gear reducing DC motor: 24 V
Local and remote modes of operation:
System DDC
Cantilever control box
Power supply
Digital drive controller
With Load / Unload / Stop / Local
Remote switches
Thumb wheel speed buttons
Load and unload approach photo sensors
With pre-dwell
Post-dwell prior to door closure
Boat out complete
Backside mounting
Diagnostic LED’s within power
Interconnecting cable
(3) MRL Z2 atmospheric head assemblies (Tube 2, 3 and 4)
SAINT GOBAIN Square shank SiC paddle compatible, 2"
(2) Self aligning top and bottom head assemblies
(3) Clamping assembly to secure door assemblies
Adjustable pivot pin
Paddle containment tube with torque sensitive paddle lock
Quartz door closure
SST Scavenger closure plate
Dual quartz rods with teflon retainers housed in a SST clamping tube assembly
5 Axis of adjustment
Designed for tool less head and door removal
(3) MRL Tube level controllers (Tube 2, 3 and 4)
(15) Valves on / Off
(8) MFC's to one of 4 values
(3) Zones of heat to 1 of 8 temperature
Temperature control mode: Spike or profile
(7) Front panel outputs (Lights / Horn)
Programmable step exits from one or more of following
On time (Hours: minutes: seconds)
On (12) Programmable digital inputs
On analog input (Temperature or gas) programmed value
On leak check
On profile completed
On complete boat-in or boat-out (for auto load only)
(3) Independent temperature control loops:
Direct digital temperature control
(8) Set points per loop
Programmable alert / Alarm deviation limits
Spike control mode with programmable PID coefficients
Profile control mode
(15) Valve outputs:
Designed to drive pneumatic solenoid directly (5 watt)
24 VDC Supplied with system
(8) Analog (MFC) loops:
Designed for direct interface to standard MFC's
(4) Set points per loop
Programmable alert / Alarm deviation limits
Step redirect:
(8) Redirect destinations
Programmed based on various combinations:
Digital inputs
Temperature alarms
Gas alarms
Human machine interface
HMI Color touch screen per tube level
Spare parts included:
Fuse set
Indicator light and lens set
SCR Firing card
Temperature controller 1/32 din
(2) Dual junction spikes t/c type R
Tri junction type R profiles t/c
Load end vestibule block
Source end vestibule block
Load end soft collar
Source end soft disk
Quartz process tube
(4) Quartz boats
Quartz door closure
(2) Quartz nails
(2) Quartz nail sleeves
Quartz door seal
(2) Soft O’Rings for quartz door seal.
MRL MDL 1148 is a diffusion furnace and accessories package designed for efficient and accurate material diffusion. The furnace is suitable for annealing, alloying, and coating of various metals. The specialized package consists of a graphite heat-zone system with a power supply designed for even temperature control and accuracy. The furnace itself is dimensioned to 91 cm wide, 55 cm deep and 137 cm high. It has a working chamber of 78 cm in diameter and 89 cm in depth, with the ability to accept loads of up to 150 kg in weight. The controlled temperature range is between ambient and 2000°C and is maintained with a high degree of accuracy and uniformity. Heating is done through 8 external zone furnaces, each with its own independent vertical lifting door. The independently adjustable zone temperatures are powered by a 400 AMP thyristor power supply and they are digitally conrolled with setpoints and corrections via a four channel process controller. The furnace is equipped with double-walled fibreglass insulation package which helps prevent heat loss and keeps the exterior clean. There is also an additional 2-metre long section of graphite heating elements with an energy-efficient cooling jacket to ensure efficient operation and prevent the insulation from deteriorating. The package also includes accessories such as a temperature regulating device, graphite split blocks, maintenance tools, and wire sets. The split blocks and wire set allow for easy, efficient, and secure transportation of the diffusion furnace from one location to another, as well as providing protection from dust and dirt. Additional accessories such as a cooling fan, emergency electrical cut-offs, gas flow safety interlocks and emergency cooling systems are available as required. Overall, MDL 1148 diffusion furnace package is extremely durable and reliable, offering a comprehensive yet affordable solution for material diffusion. The reliable design, accurate temperature control and wide range of accessories make it an excellent choice for annealing, alloying, and coating of various metals.
There are no reviews yet