Used MRL Phoenix #9076185 for sale
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ID: 9076185
Wafer Size: 6"
LPCVD Furnace, 6"
(3) Tubes: Nitride LPCVD
(1) Tube: Poly LPCVD
Four tubes with semi-auto boat loader
Laminar flow and gas cabinet
High temperature element
40" Flat zone
Tube1: Nitride (SiH2Cl2, NH3,N2)
Tube2: Nitride (SiH2Cl2, NH3,N2)
Tube3: Nitride (SiH2Cl2, NH3,N2)
Tube4:Tisi.
MRL Phoenix is a diffusion furnace and accessorie designed to provide reliable and precise processing of materials within a variety of industrial applications. This system is specifically designed for gas and vapour treatments such as diffusion, oxidation, and surface growth, and can be used with a range of metals, ceramics, and polymers. This unique furnace features a powerful, high-temperature heat source, which can reach up to 1400°C. It also contains a direct quartz tube atmosphere delivery system, which ensures a consistent and even diffusion process throughout the internal components. The atmosphere can be tailored to suit specific processes, as it can be tailored for specific levels of Oxygen, Nitrogen, and Hydrogen. Phoenix offers a unique easy load design which allows easy access to the sample from the exterior of the furnace. All necessary loading and unloading of samples is done through a cooling mechanism where heat is removed before and during loading, and also during unloading. The built in water-cooled structure and a superior insulation system make the furnace very efficient and stable, while the high-performance and high-precision radiation controllers guarantee maximum control of the process. Furthermore, the exterior of the furnace is constructed from robust, stainless steel for superior durability. The diffusion furnace also has a series of opto-thermal sensors that help monitor the internal temperature of the furnace for accurate and reliable data reading. They measure the temperature and prevent overheating, so that the furnace remains safe. The furnace is also compatible with a range of standard accessories that can make it easier to scale and test samples. The accessories range from trays to be put into the furnace and temperature controllers to keep it from overheating. Overall, MRL Phoenix is a cutting-edge diffusion furnace that has a wide range of applications in different industries. Its powerful heat source, high precision and efficient control mechanisms, and the quality construction and its accessories make it an effective solution for various industrial requirements.
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